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Numerical Analysis of Zeptogram/Hz-Level Mass Responsivity for In-Plane Resonant Nano-Electro-Mechanical Sensors

Numerical Analysis of Zeptogram/Hz-Level Mass Responsivity for In-Plane Resonant Nano-Electro-Mechanical Sensors
Numerical Analysis of Zeptogram/Hz-Level Mass Responsivity for In-Plane Resonant Nano-Electro-Mechanical Sensors
This paper presents numerical analysis of an in-plane resonant Nano-Electro-Mechanical (NEM) sensor based on mass-detection principle using a 3D FEM electromechanical simulation combined with a NEM/MOS hybrid circuit simulation. The self-assembled linker molecules are modeled simply by adding extra surface coating layer, and three different functionalization schemes are studied: top and bottom, only top and all-around configurations. We investigate the impacts of the coating layer mass change as well as stiffness change on the resonance frequency by varying thickness of the coating layer for all the configurations. The small signal AC analysis of the sensor is performed, and the effect of the coating layer on the output signal is studied. Mass of the coating layer is then changed in order to model the random adsorption of target molecules onto the coating layer surface. We show that the NEM sensor enables to achieve the mass responsivity of 0.05 zeptogram/Hz for all the different functionalization schemes, which is approximately eleven orders smaller than that reported for present quartz crystal microbalance sensors. Moreover, we clarify that the scaling rule of the mass responsivity is given by k4 regardless of the different functionlization configurations.
0167-9317
Arab Hassani, Feazeh
55000b5b-5b4d-457d-b9f1-07327bf28140
Cobianu, Cornel
bf4231ee-5ced-4adb-b37a-280cd140ceac
Armini, Silvia
38fcf30e-0559-4ca2-ae64-55f2858d4802
Petrescu, Violeta
12b072a6-87e7-4471-a913-4abe95cc3dab
Merken, Patrick
cb4e201e-c99b-4337-ac2f-1637e5c6fa80
Tsamados, Dimitrios
cb0faccd-5b28-4421-b995-aa189d459bec
Mihai Ionescu, Adrian
201d6d24-14dc-496b-939e-20b98af6a35f
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Arab Hassani, Feazeh
55000b5b-5b4d-457d-b9f1-07327bf28140
Cobianu, Cornel
bf4231ee-5ced-4adb-b37a-280cd140ceac
Armini, Silvia
38fcf30e-0559-4ca2-ae64-55f2858d4802
Petrescu, Violeta
12b072a6-87e7-4471-a913-4abe95cc3dab
Merken, Patrick
cb4e201e-c99b-4337-ac2f-1637e5c6fa80
Tsamados, Dimitrios
cb0faccd-5b28-4421-b995-aa189d459bec
Mihai Ionescu, Adrian
201d6d24-14dc-496b-939e-20b98af6a35f
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9

Arab Hassani, Feazeh, Cobianu, Cornel, Armini, Silvia, Petrescu, Violeta, Merken, Patrick, Tsamados, Dimitrios, Mihai Ionescu, Adrian, Tsuchiya, Yoshishige and Mizuta, Hiroshi (2011) Numerical Analysis of Zeptogram/Hz-Level Mass Responsivity for In-Plane Resonant Nano-Electro-Mechanical Sensors. Microelectronic Engineering.

Record type: Article

Abstract

This paper presents numerical analysis of an in-plane resonant Nano-Electro-Mechanical (NEM) sensor based on mass-detection principle using a 3D FEM electromechanical simulation combined with a NEM/MOS hybrid circuit simulation. The self-assembled linker molecules are modeled simply by adding extra surface coating layer, and three different functionalization schemes are studied: top and bottom, only top and all-around configurations. We investigate the impacts of the coating layer mass change as well as stiffness change on the resonance frequency by varying thickness of the coating layer for all the configurations. The small signal AC analysis of the sensor is performed, and the effect of the coating layer on the output signal is studied. Mass of the coating layer is then changed in order to model the random adsorption of target molecules onto the coating layer surface. We show that the NEM sensor enables to achieve the mass responsivity of 0.05 zeptogram/Hz for all the different functionalization schemes, which is approximately eleven orders smaller than that reported for present quartz crystal microbalance sensors. Moreover, we clarify that the scaling rule of the mass responsivity is given by k4 regardless of the different functionlization configurations.

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More information

Accepted/In Press date: 8 May 2011
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 272091
URI: https://eprints.soton.ac.uk/id/eprint/272091
ISSN: 0167-9317
PURE UUID: 6cf98d3a-4a16-459d-87e9-a6c505f0b590

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Date deposited: 09 Mar 2011 22:18
Last modified: 18 Jul 2017 06:34

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Contributors

Author: Feazeh Arab Hassani
Author: Cornel Cobianu
Author: Silvia Armini
Author: Violeta Petrescu
Author: Patrick Merken
Author: Dimitrios Tsamados
Author: Adrian Mihai Ionescu
Author: Yoshishige Tsuchiya
Author: Hiroshi Mizuta

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