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Nano-scale resonant sensors for gas and bio detection: expectations and challenges.

Cobianu, C., Serban, B., Mihaila, M., Dumitru, V., A. Hassani, F., Tsuchiya, Y., Mizuta, H., Cherman, V., De Wolf, I., Petrescu, V., Santana, J., Dupre, C., Ollier, E., Ernst, T., Andreucci, P., Duraffourg, L., Tsamados, D. and Ionescu, A. M. (2009) Nano-scale resonant sensors for gas and bio detection: expectations and challenges. At Proceedings of the 2009 32nd International Semiconductor Conference. CAS 2009. , pp. 259-262.

Record type: Conference or Workshop Item (Paper)


It is the purpose of this paper to show expectations, challenges and initial steps concerning the realization of resonant chemical NEMS sensors able to meet the needs of future applications. Here, we focus on the functionalization principles of the sensing Self-Assembled Monolayer (SAM), modeling and simulation of CMOS-SOI resonant NEMS sensor with electrostatic actuation and MOSFET detection, first CMOS-SOI experimental results for making Si nano wire for piezoresistive detection schemes, noise limits of the resonant nano-sensors, challenges for the design of the on-chip readout circuitry, and the specific reliability issues of resonant NEMS. Some of the simulated sensitivity results of about 5 Hz/zg at 433 MHz and MOSFET detection are close to the best state- of- art experimental data from literature of 0.7 Hz/zg at 127 MHz. It is our challenge to pursuit at experimental level with our nanosensor concepts for making reliable nanodevices addressing the needs of integrated sensing.

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Published date: 2009
Venue - Dates: Proceedings of the 2009 32nd International Semiconductor Conference. CAS 2009, 2009-01-01
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 272092
PURE UUID: bcbeabec-d434-403e-b869-22034a621ff4

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Date deposited: 09 Mar 2011 22:55
Last modified: 18 Jul 2017 06:34

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Author: C. Cobianu
Author: B. Serban
Author: M. Mihaila
Author: V. Dumitru
Author: F. A. Hassani
Author: Y. Tsuchiya
Author: H. Mizuta
Author: V. Cherman
Author: I. De Wolf
Author: V. Petrescu
Author: J. Santana
Author: C. Dupre
Author: E. Ollier
Author: T. Ernst
Author: P. Andreucci
Author: L. Duraffourg
Author: D. Tsamados
Author: A. M. Ionescu

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