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A theory of pad conditioning for chemical-mechanical polishing

A theory of pad conditioning for chemical-mechanical polishing
A theory of pad conditioning for chemical-mechanical polishing
Statistical models are presented to describe the evolution of the surface roughness of polishing pads during the pad-conditioning process in chemical-mechanical polishing. The models describe the evolution of the surface-height probability-density function of solid pads during fixed height or fixed cut-rate conditioning. An integral equation is derived for the effect of conditioning on a foamed pad in terms of a model for a solid pad. The models that combine wear and conditioning are then discussed for both solid and foamed pads. Models include the dependence of the surface roughness on the shape and density of the cutting tips used in the conditioner and on other operating parameters. Good agreement is found between the model, Monte Carlo simulations and with experimental data.
0022-0833
1-24
Borucki, Leonard J.
505372b4-3ba2-4e96-a2fe-c3780cb29000
Witelsi, Thomas
6f3708a2-92ba-45ea-a88a-81d8e2593ed5
Please, Colin
118dffe7-4b38-4787-a972-9feec535839e
Kramer, Peter R.
f1f9ce87-8b42-4812-b133-3d03a0a9d72b
Schwendeman, Donald
df7e83ca-5b0a-43a8-9508-429b6e4d7ff2
Borucki, Leonard J.
505372b4-3ba2-4e96-a2fe-c3780cb29000
Witelsi, Thomas
6f3708a2-92ba-45ea-a88a-81d8e2593ed5
Please, Colin
118dffe7-4b38-4787-a972-9feec535839e
Kramer, Peter R.
f1f9ce87-8b42-4812-b133-3d03a0a9d72b
Schwendeman, Donald
df7e83ca-5b0a-43a8-9508-429b6e4d7ff2

Borucki, Leonard J., Witelsi, Thomas, Please, Colin, Kramer, Peter R. and Schwendeman, Donald (2004) A theory of pad conditioning for chemical-mechanical polishing. Journal of Engineering Mathematics, 50 (1), 1-24.

Record type: Article

Abstract

Statistical models are presented to describe the evolution of the surface roughness of polishing pads during the pad-conditioning process in chemical-mechanical polishing. The models describe the evolution of the surface-height probability-density function of solid pads during fixed height or fixed cut-rate conditioning. An integral equation is derived for the effect of conditioning on a foamed pad in terms of a model for a solid pad. The models that combine wear and conditioning are then discussed for both solid and foamed pads. Models include the dependence of the surface roughness on the shape and density of the cutting tips used in the conditioner and on other operating parameters. Good agreement is found between the model, Monte Carlo simulations and with experimental data.

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Published date: 2004

Identifiers

Local EPrints ID: 29263
URI: https://eprints.soton.ac.uk/id/eprint/29263
ISSN: 0022-0833
PURE UUID: 587ad2fb-d82a-43a4-965d-b4828337952f

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Date deposited: 11 May 2006
Last modified: 01 Oct 2017 08:17

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