Miniaturization of Bragg-multiplexed membrane transducers
Miniaturization of Bragg-multiplexed membrane transducers
This paper reports the miniaturization of Bragg-multiplexed pressure sensing membranes for integrated photonic chips. The analysis compares a novel Fabry-Pérot Bragg grating (FPBG) design that integrally spans a thin (54 µm) silica membrane to a recently reported single Bragg grating (BG) design that resides within the membrane. Unlike the single BG, the FPBG maintains spectral integrity as the dimensions of the membrane become sub-millimetre. In addition it is shown that the FPBG structure can also be used for inherent temperature referencing, having a Bragg thermal sensitivity of 13.5 pm °C-1, which can be decoupled from pressure effects. For the reported sub-millimetre membrane, pressure resolution was enhanced by a factor of three and spectral bandwidth reduced by over five-fold.
25017
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
25 January 2012
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Holmes, C., Carpenter, Lewis, Gates, J.C. and Smith, P.G.R.
(2012)
Miniaturization of Bragg-multiplexed membrane transducers.
Journal of Micromechanics and Microengineering, 22 (2), .
(doi:10.1088/0960-1317/22/2/025017).
Abstract
This paper reports the miniaturization of Bragg-multiplexed pressure sensing membranes for integrated photonic chips. The analysis compares a novel Fabry-Pérot Bragg grating (FPBG) design that integrally spans a thin (54 µm) silica membrane to a recently reported single Bragg grating (BG) design that resides within the membrane. Unlike the single BG, the FPBG maintains spectral integrity as the dimensions of the membrane become sub-millimetre. In addition it is shown that the FPBG structure can also be used for inherent temperature referencing, having a Bragg thermal sensitivity of 13.5 pm °C-1, which can be decoupled from pressure effects. For the reported sub-millimetre membrane, pressure resolution was enhanced by a factor of three and spectral bandwidth reduced by over five-fold.
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Published date: 25 January 2012
Organisations:
Optoelectronics Research Centre
Identifiers
Local EPrints ID: 301216
URI: http://eprints.soton.ac.uk/id/eprint/301216
ISSN: 0960-1317
PURE UUID: af9703ea-77b5-444c-8132-3e29241142e7
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Date deposited: 29 Feb 2012 14:40
Last modified: 15 Mar 2024 03:27
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Author:
Lewis Carpenter
Author:
J.C. Gates
Author:
P.G.R. Smith
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