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Miniaturization of Bragg-multiplexed membrane transducers

Miniaturization of Bragg-multiplexed membrane transducers
Miniaturization of Bragg-multiplexed membrane transducers
This paper reports the miniaturization of Bragg-multiplexed pressure sensing membranes for integrated photonic chips. The analysis compares a novel Fabry-Pérot Bragg grating (FPBG) design that integrally spans a thin (54 µm) silica membrane to a recently reported single Bragg grating (BG) design that resides within the membrane. Unlike the single BG, the FPBG maintains spectral integrity as the dimensions of the membrane become sub-millimetre. In addition it is shown that the FPBG structure can also be used for inherent temperature referencing, having a Bragg thermal sensitivity of 13.5 pm °C-1, which can be decoupled from pressure effects. For the reported sub-millimetre membrane, pressure resolution was enhanced by a factor of three and spectral bandwidth reduced by over five-fold.
0960-1317
25017
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6

Holmes, C., Carpenter, Lewis, Gates, J.C. and Smith, P.G.R. (2012) Miniaturization of Bragg-multiplexed membrane transducers. Journal of Micromechanics and Microengineering, 22 (2), 25017. (doi:10.1088/0960-1317/22/2/025017).

Record type: Article

Abstract

This paper reports the miniaturization of Bragg-multiplexed pressure sensing membranes for integrated photonic chips. The analysis compares a novel Fabry-Pérot Bragg grating (FPBG) design that integrally spans a thin (54 µm) silica membrane to a recently reported single Bragg grating (BG) design that resides within the membrane. Unlike the single BG, the FPBG maintains spectral integrity as the dimensions of the membrane become sub-millimetre. In addition it is shown that the FPBG structure can also be used for inherent temperature referencing, having a Bragg thermal sensitivity of 13.5 pm °C-1, which can be decoupled from pressure effects. For the reported sub-millimetre membrane, pressure resolution was enhanced by a factor of three and spectral bandwidth reduced by over five-fold.

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More information

Published date: 25 January 2012
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 301216
URI: https://eprints.soton.ac.uk/id/eprint/301216
ISSN: 0960-1317
PURE UUID: af9703ea-77b5-444c-8132-3e29241142e7
ORCID for C. Holmes: ORCID iD orcid.org/0000-0001-9021-3760
ORCID for J.C. Gates: ORCID iD orcid.org/0000-0001-8671-5987
ORCID for P.G.R. Smith: ORCID iD orcid.org/0000-0003-0319-718X

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Date deposited: 29 Feb 2012 14:40
Last modified: 19 Nov 2019 01:58

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Contributors

Author: C. Holmes ORCID iD
Author: Lewis Carpenter
Author: J.C. Gates ORCID iD
Author: P.G.R. Smith ORCID iD

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