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Selective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOS

Selective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOS
Selective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOS
Resonant SOI-CMOSFET NEMS gas/bio sensors represent an important fundamental research topic and an emerging technology for many applications, thanks to the high flexibility offered by the surface functionalization methods which can tailor sensing layers for a large variety of gases and biomolecules. Self-assembled monolayers (SAMs) are one of the most relevant functionalization approaches to achieve selectivity in the sensing processes. Although the optimization of these organic films has received considerable attention, most of the functionalization routes have focused on the coating of sensors with relative large areas. The downscaling of the SAMs to small nano-devices, such as Si and poly SiGe NEMS and MEMS-based sensors, requires additional tools, both for their selective deposition and characterization. In this work, two main approaches to selective Si nanowires functionalization are being investigated: i) selective Joule heating ablation of the protective polymer layer on the suspended NW surface, and ii) e-beam lithography to open the resist layer on the NW area. In a following step, a NH2-SAM layer is deposited on the unprotected silicon oxide surface and glutaraldehyde molecules are used as a linker between the SAM amino functionality and biotin. The frequency shift response during CO2 sensing is studied as a function of an increasing number of amino functionalities of the silanization precursors. Finally Kelvin probe atomic force microscopy allows mapping the functionalized area due to the observed shift in surface potential between bare and SAMs-coated SiO2 surface.
Armini, Silvia
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Cherman, Vladimir
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Volodin, Alexander
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Lenci, Silvia
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Pieri, Francesco
085ad336-0cc8-451e-a15f-40ed5d0dc130
Wouters, Daan
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Moonens, Joos
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Neutens, Pieter
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Dupré, Cecilia
87ef38a0-96df-4613-9875-8facf55d7102
Ollier, Eric
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Tsuchiya, Yoshishige
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Mizuta, Hiroshi
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Armini, Silvia
38fcf30e-0559-4ca2-ae64-55f2858d4802
Cherman, Vladimir
5a8a95d2-1c2b-4387-b732-cc32879d4bac
Volodin, Alexander
3a4d0bb9-a104-4ca0-9abb-018b7db275d9
Lenci, Silvia
1cecce0c-da0f-4ff9-a9e3-be363a104050
Pieri, Francesco
085ad336-0cc8-451e-a15f-40ed5d0dc130
Wouters, Daan
7b091635-b1fd-4b81-8b3d-4be134431ede
Moonens, Joos
495c2055-0ffd-44d5-af0e-b0b2b12aee54
Neutens, Pieter
6935c33b-2dee-4c7d-a913-c3c295966a66
Dupré, Cecilia
87ef38a0-96df-4613-9875-8facf55d7102
Ollier, Eric
9bb3a51a-1328-492d-b5d9-5c2829160327
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9

Armini, Silvia, Cherman, Vladimir, Volodin, Alexander, Lenci, Silvia, Pieri, Francesco, Wouters, Daan, Moonens, Joos, Neutens, Pieter, Dupré, Cecilia, Ollier, Eric, Tsuchiya, Yoshishige and Mizuta, Hiroshi (2012) Selective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOS. Materials Research Society Spring Meeting 2012, United States. 09 - 13 Apr 2012.

Record type: Conference or Workshop Item (Poster)

Abstract

Resonant SOI-CMOSFET NEMS gas/bio sensors represent an important fundamental research topic and an emerging technology for many applications, thanks to the high flexibility offered by the surface functionalization methods which can tailor sensing layers for a large variety of gases and biomolecules. Self-assembled monolayers (SAMs) are one of the most relevant functionalization approaches to achieve selectivity in the sensing processes. Although the optimization of these organic films has received considerable attention, most of the functionalization routes have focused on the coating of sensors with relative large areas. The downscaling of the SAMs to small nano-devices, such as Si and poly SiGe NEMS and MEMS-based sensors, requires additional tools, both for their selective deposition and characterization. In this work, two main approaches to selective Si nanowires functionalization are being investigated: i) selective Joule heating ablation of the protective polymer layer on the suspended NW surface, and ii) e-beam lithography to open the resist layer on the NW area. In a following step, a NH2-SAM layer is deposited on the unprotected silicon oxide surface and glutaraldehyde molecules are used as a linker between the SAM amino functionality and biotin. The frequency shift response during CO2 sensing is studied as a function of an increasing number of amino functionalities of the silanization precursors. Finally Kelvin probe atomic force microscopy allows mapping the functionalized area due to the observed shift in surface potential between bare and SAMs-coated SiO2 surface.

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More information

Published date: 12 April 2012
Venue - Dates: Materials Research Society Spring Meeting 2012, United States, 2012-04-09 - 2012-04-13
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 337974
URI: https://eprints.soton.ac.uk/id/eprint/337974
PURE UUID: 39a0d919-6a33-4cf4-baa5-821217609744

Catalogue record

Date deposited: 09 May 2012 13:34
Last modified: 18 Jul 2017 05:59

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