Planar micromachined glass cantilevers utilising integrated Bragg Fabry-Perot cavities
Planar micromachined glass cantilevers utilising integrated Bragg Fabry-Perot cavities
Here we demonstrate a glass cantilever based on a unique micromachining and etching approach, combined with UV written Bragg gratings. We shall also discuss the increase in sensitivity by using two Bragg gratings to form Fabry-Pérot cavity. Cantilevers are in ultra sensitive force sensors used in applications such as Atomic Force Microscopy, mass sensing and acoustic transducers.
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
August 2010
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Carpenter, Lewis, Holmes, Christopher, Gates, James C. and Smith, Peter G.R.
(2010)
Planar micromachined glass cantilevers utilising integrated Bragg Fabry-Perot cavities.
Photon 10, , Southampton, United Kingdom.
23 - 26 Aug 2010.
1 pp
.
Record type:
Conference or Workshop Item
(Paper)
Abstract
Here we demonstrate a glass cantilever based on a unique micromachining and etching approach, combined with UV written Bragg gratings. We shall also discuss the increase in sensitivity by using two Bragg gratings to form Fabry-Pérot cavity. Cantilevers are in ultra sensitive force sensors used in applications such as Atomic Force Microscopy, mass sensing and acoustic transducers.
More information
e-pub ahead of print date: August 2010
Published date: August 2010
Venue - Dates:
Photon 10, , Southampton, United Kingdom, 2010-08-23 - 2010-08-26
Organisations:
Optoelectronics Research Centre
Identifiers
Local EPrints ID: 340353
URI: http://eprints.soton.ac.uk/id/eprint/340353
PURE UUID: b2146f0f-f2fe-49fa-bd4f-0f73c7986d3a
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Date deposited: 19 Jun 2012 13:54
Last modified: 15 Mar 2024 03:27
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Contributors
Author:
Lewis Carpenter
Author:
James C. Gates
Author:
Peter G.R. Smith
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