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Planar micromachined glass cantilevers utilising integrated Bragg Fabry-Perot cavities

Planar micromachined glass cantilevers utilising integrated Bragg Fabry-Perot cavities
Planar micromachined glass cantilevers utilising integrated Bragg Fabry-Perot cavities
Here we demonstrate a glass cantilever based on a unique micromachining and etching approach, combined with UV written Bragg gratings. We shall also discuss the increase in sensitivity by using two Bragg gratings to form Fabry-Pérot cavity. Cantilevers are in ultra sensitive force sensors used in applications such as Atomic Force Microscopy, mass sensing and acoustic transducers.
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Holmes, Christopher
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Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6

Carpenter, Lewis, Holmes, Christopher, Gates, James C. and Smith, Peter G.R. (2010) Planar micromachined glass cantilevers utilising integrated Bragg Fabry-Perot cavities. Photon 10, United Kingdom. 23 - 26 Aug 2010. 1 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

Here we demonstrate a glass cantilever based on a unique micromachining and etching approach, combined with UV written Bragg gratings. We shall also discuss the increase in sensitivity by using two Bragg gratings to form Fabry-Pérot cavity. Cantilevers are in ultra sensitive force sensors used in applications such as Atomic Force Microscopy, mass sensing and acoustic transducers.

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More information

e-pub ahead of print date: August 2010
Published date: August 2010
Venue - Dates: Photon 10, United Kingdom, 2010-08-23 - 2010-08-26
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 340353
URI: https://eprints.soton.ac.uk/id/eprint/340353
PURE UUID: b2146f0f-f2fe-49fa-bd4f-0f73c7986d3a
ORCID for James C. Gates: ORCID iD orcid.org/0000-0001-8671-5987

Catalogue record

Date deposited: 19 Jun 2012 13:54
Last modified: 06 Jun 2018 12:51

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