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Investigating planar integrated glass cantilevers utilizing Bragg gratings and mechanical resonance in a vacuum

Investigating planar integrated glass cantilevers utilizing Bragg gratings and mechanical resonance in a vacuum
Investigating planar integrated glass cantilevers utilizing Bragg gratings and mechanical resonance in a vacuum
Glass-micro-cantilever Bragg grating devices incorporate both micro-machining and direct UV writing. This novel combination of fabrication techniques reduce construction times on photolithography and allow rapid prototyping. It utilizes the cantilevers mechanical resonance to allow it to be used to detect the change in the air's damping coefficient with pressure.
component, cantilevers, planar integrated optics, bragg gratings
Carpenter, L.
0daa548e-0d42-4b06-b914-45bfbec41759
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Carpenter, L.
0daa548e-0d42-4b06-b914-45bfbec41759
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6

Carpenter, L., Holmes, C., Rogers, Helen, Gates, J.C. and Smith, P.G.R. (2010) Investigating planar integrated glass cantilevers utilizing Bragg gratings and mechanical resonance in a vacuum. European Conference on Integrated Optics (ECIO) 2010, Cambridge, United Kingdom. 07 - 09 Apr 2010. 3 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

Glass-micro-cantilever Bragg grating devices incorporate both micro-machining and direct UV writing. This novel combination of fabrication techniques reduce construction times on photolithography and allow rapid prototyping. It utilizes the cantilevers mechanical resonance to allow it to be used to detect the change in the air's damping coefficient with pressure.

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More information

e-pub ahead of print date: April 2010
Venue - Dates: European Conference on Integrated Optics (ECIO) 2010, Cambridge, United Kingdom, 2010-04-07 - 2010-04-09
Keywords: component, cantilevers, planar integrated optics, bragg gratings
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 340895
URI: https://eprints.soton.ac.uk/id/eprint/340895
PURE UUID: 3e6833b9-97e1-4d79-80e6-00a19db4ea4b
ORCID for C. Holmes: ORCID iD orcid.org/0000-0001-9021-3760
ORCID for J.C. Gates: ORCID iD orcid.org/0000-0001-8671-5987
ORCID for P.G.R. Smith: ORCID iD orcid.org/0000-0003-0319-718X

Catalogue record

Date deposited: 09 Jul 2012 14:32
Last modified: 17 Oct 2019 00:38

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