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Growth of garnet mixed layers and superlattices by dual-beam pulsed laser deposition

Growth of garnet mixed layers and superlattices by dual-beam pulsed laser deposition
Growth of garnet mixed layers and superlattices by dual-beam pulsed laser deposition
Dual-beam Pulsed Laser Deposition (PLD) shows great promise in the fabrication of materials and structures not possible with conventional single-laser, single-target PLD. In particular, the use of programmable beam shutters offers a myriad of possibilities for growth of designer in-plane structures, including graded refractive index or laser dopant concentration in planar waveguides, photonic crystals and chirped Bragg reflectors. As a preliminary study of this technique, we report the growth of superlattices on Y3Al5O12 substrates by dual-beam PLD. Bursts of pulses from two lasers were alternately incident on single crystal Gd3Ga5O12 (GGG) and Gd3Sc2Ga3O12 (GSGG) targets. Mechanical beam shutters were used to set the number of pulses in a burst, allowing the fabrication of seven films with different superlattice periods. X-ray diffraction analysis suggested that for smaller pulse bursts (<100 shots, ~2 nm growth) films grew as single-layer mixed crystal (GGG:GSGG), whereas larger pulse bursts (>200 shots, ~4 nm growth) resulted in superlattice growth, as indicated by the presence of satellite diffraction peaks. Analysis of peak line widths suggested that for each multilayer sample grown, superlattice periods remain constant to within 3% over the analysed area. Having demonstrated the efficacy of the shutter technique, investigations are now focusing on the growth of more sophisticated structures, such as graded or aperiodic structures, the outcomes of which will be reported.
Sloyan, K.A.
5b66c8be-437e-467f-aeb0-5a742eea5abf
May-Smith, T.C.
47952bbd-ce28-4507-a723-b4d80bf0f809
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Sloyan, K.A.
5b66c8be-437e-467f-aeb0-5a742eea5abf
May-Smith, T.C.
47952bbd-ce28-4507-a723-b4d80bf0f809
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020

Sloyan, K.A., May-Smith, T.C. and Eason, R.W. (2010) Growth of garnet mixed layers and superlattices by dual-beam pulsed laser deposition. European Materials Research Society (EMRS) Spring Meeting 2010, France. 07 - 11 Jun 2010.

Record type: Conference or Workshop Item (Paper)

Abstract

Dual-beam Pulsed Laser Deposition (PLD) shows great promise in the fabrication of materials and structures not possible with conventional single-laser, single-target PLD. In particular, the use of programmable beam shutters offers a myriad of possibilities for growth of designer in-plane structures, including graded refractive index or laser dopant concentration in planar waveguides, photonic crystals and chirped Bragg reflectors. As a preliminary study of this technique, we report the growth of superlattices on Y3Al5O12 substrates by dual-beam PLD. Bursts of pulses from two lasers were alternately incident on single crystal Gd3Ga5O12 (GGG) and Gd3Sc2Ga3O12 (GSGG) targets. Mechanical beam shutters were used to set the number of pulses in a burst, allowing the fabrication of seven films with different superlattice periods. X-ray diffraction analysis suggested that for smaller pulse bursts (<100 shots, ~2 nm growth) films grew as single-layer mixed crystal (GGG:GSGG), whereas larger pulse bursts (>200 shots, ~4 nm growth) resulted in superlattice growth, as indicated by the presence of satellite diffraction peaks. Analysis of peak line widths suggested that for each multilayer sample grown, superlattice periods remain constant to within 3% over the analysed area. Having demonstrated the efficacy of the shutter technique, investigations are now focusing on the growth of more sophisticated structures, such as graded or aperiodic structures, the outcomes of which will be reported.

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More information

e-pub ahead of print date: June 2010
Venue - Dates: European Materials Research Society (EMRS) Spring Meeting 2010, France, 2010-06-07 - 2010-06-11
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 340915
URI: http://eprints.soton.ac.uk/id/eprint/340915
PURE UUID: ccc73f4a-1c92-477b-b790-9f29c3e7b60c
ORCID for R.W. Eason: ORCID iD orcid.org/0000-0001-9704-2204

Catalogue record

Date deposited: 09 Jul 2012 15:33
Last modified: 18 Feb 2021 16:36

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