2 - Emerging pulsed laser deposition techniques

Eason, R.W., May-Smith, T.C., Sloyan, K.A., Gazia, R., Darby, M.S.B. and Sposito, A. (2012) 2 - Emerging pulsed laser deposition techniques. In, Vainos, N.A. (ed.) Laser Growth and Processing of Photonic Devices. (Woodhead Publishing Series in Electronic and Optical Materials) Cambridge, GB. Woodhead Publishing, pp. 55-84. (doi:10.1533/9780857096227.1.53).

Abstract

The use of lasers for the deposition and processing of electronic and photonic materials is becoming increasingly widespread and advances in processing technology are reducing costs and increasing throughput. Laser deposition of photonic materials and laser processing techniques can produce high quality devices with novel properties. Part one covers laser deposition and growth of materials, including pulsed laser deposition and laser-induced self-assembly of semiconductors. Part two describes laser patterning and lithography techniques, such as 3D laser lithography. Part three looks at laser treatments to manipulate properties of photonic materials for applications such as optical storage, laser components, waveguides and displays.

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Contributors

Author: R.W. Eason

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