The University of Southampton
University of Southampton Institutional Repository

Focused Ion Beam Milling of Exfoliated Graphene for Prototyping of Electronic Devices

Focused Ion Beam Milling of Exfoliated Graphene for Prototyping of Electronic Devices
Focused Ion Beam Milling of Exfoliated Graphene for Prototyping of Electronic Devices
We demonstrate a focused ion beam (FIB) prototyping technique that accurately aligns a two terminal contact structure to exfoliated graphene. Alignment accuracy of better than 250nm has been achieved without direct FIB imaging of the graphene. In situ deposited tungsten is used to contact the graphene channel and the measured channel resistance is 58 k­ohm.
0167-9317
Schmidt, Marek E.
e4489af8-f4ff-4e8d-b7d2-8ca34cb51445
Johari, Zaharah
92de9070-186a-4ea7-bbeb-373a570ea0d3
Ismail, Razali
930921ee-1916-4fe1-80ef-75789a99c18a
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Chong, Harold M H
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Schmidt, Marek E.
e4489af8-f4ff-4e8d-b7d2-8ca34cb51445
Johari, Zaharah
92de9070-186a-4ea7-bbeb-373a570ea0d3
Ismail, Razali
930921ee-1916-4fe1-80ef-75789a99c18a
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Chong, Harold M H
795aa67f-29e5-480f-b1bc-9bd5c0d558e1

Schmidt, Marek E., Johari, Zaharah, Ismail, Razali, Mizuta, Hiroshi and Chong, Harold M H (2012) Focused Ion Beam Milling of Exfoliated Graphene for Prototyping of Electronic Devices. Microelectronic Engineering. (In Press)

Record type: Article

Abstract

We demonstrate a focused ion beam (FIB) prototyping technique that accurately aligns a two terminal contact structure to exfoliated graphene. Alignment accuracy of better than 250nm has been achieved without direct FIB imaging of the graphene. In situ deposited tungsten is used to contact the graphene channel and the measured channel resistance is 58 k­ohm.

Full text not available from this repository.

More information

Accepted/In Press date: 2012
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 341561
URI: https://eprints.soton.ac.uk/id/eprint/341561
ISSN: 0167-9317
PURE UUID: e1c578b2-3e0b-463d-b059-ad7a625ac420
ORCID for Harold M H Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 27 Jul 2012 08:34
Last modified: 06 Jun 2018 12:37

Export record

Contributors

Author: Marek E. Schmidt
Author: Zaharah Johari
Author: Razali Ismail
Author: Hiroshi Mizuta

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×