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Integrated corner mirrors physically micromachined in silica-on-silica

Integrated corner mirrors physically micromachined in silica-on-silica
Integrated corner mirrors physically micromachined in silica-on-silica
In integrated photonics, compact redirection of light can be achieved by corner (turning) mirrors, providing a route to higher density optical components. Corner mirrors have been demonstrated in both silicon-on-insulator and hollow waveguides with reported losses of 0.9dB [1] and 0.8dB [2] respectively. We report a novel method of fabricating mirrors on a silica-on-silicon substrate. The method utilises the complementary techniques of physical micromachining and direct UV writing, both providing rapid prototyping outside the cleanroom environment.
Carpenter, Lewis
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Rogers, Helen
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Holmes, C.
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Gates, J.C.
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Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6

Carpenter, Lewis, Rogers, Helen, Holmes, C., Gates, J.C. and Smith, P.G.R. (2011) Integrated corner mirrors physically micromachined in silica-on-silica. IONS-9: International OSA Network of Students Conference, Salamanca, Spain. 07 - 09 Apr 2011.

Record type: Conference or Workshop Item (Paper)

Abstract

In integrated photonics, compact redirection of light can be achieved by corner (turning) mirrors, providing a route to higher density optical components. Corner mirrors have been demonstrated in both silicon-on-insulator and hollow waveguides with reported losses of 0.9dB [1] and 0.8dB [2] respectively. We report a novel method of fabricating mirrors on a silica-on-silicon substrate. The method utilises the complementary techniques of physical micromachining and direct UV writing, both providing rapid prototyping outside the cleanroom environment.

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More information

e-pub ahead of print date: December 2011
Published date: 2011
Venue - Dates: IONS-9: International OSA Network of Students Conference, Salamanca, Spain, 2011-04-07 - 2011-04-09
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 341617
URI: http://eprints.soton.ac.uk/id/eprint/341617
PURE UUID: 093dc1a4-947b-404d-baa5-759f97d3d59f
ORCID for C. Holmes: ORCID iD orcid.org/0000-0001-9021-3760
ORCID for J.C. Gates: ORCID iD orcid.org/0000-0001-8671-5987
ORCID for P.G.R. Smith: ORCID iD orcid.org/0000-0003-0319-718X

Catalogue record

Date deposited: 31 Jul 2012 13:53
Last modified: 15 Mar 2024 03:27

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Contributors

Author: Lewis Carpenter
Author: Helen Rogers
Author: C. Holmes ORCID iD
Author: J.C. Gates ORCID iD
Author: P.G.R. Smith ORCID iD

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