Photonic microcantilevers with interferometric Bragg grating interrogation
Photonic microcantilevers with interferometric Bragg grating interrogation
Germanosilicate glass microcantilevers are fabricated featuring an integrated Fabry-Pérot interferometer. Direct UV writing of single-mode planar waveguides and Bragg gratings is combined with physical micromachining, using a precision dicing saw, to realize glass microcantilevers on a silicon platform. The device presented here has a wavelength shift force sensitivity of 330 nm/N, which is calibrated using a surface profilometer measurement and is an order of magnitude better than current state-of-the-art Bragg-grating-based sensors. The device also shows an approximately tenfold increase in amplitude modulation compared with a similar device architecture utilizing a single Gaussian-apodized Bragg grating. By forming the Fabry-Pérot cavity around the point of greatest strain, we reduce the unwanted effects of grating chirp as the cantilever is deflected and relate the performance to a mechanical model that relates cavity phase shift to deflection.
1387-1395
Carpenter, Lewis G.
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Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Snow, Benjamin
369fd679-066f-46db-9d5c-aecaa7179a6d
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
October 2012
Carpenter, Lewis G.
0daa548e-0d42-4b06-b914-45bfbec41759
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Snow, Benjamin
369fd679-066f-46db-9d5c-aecaa7179a6d
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Carpenter, Lewis G., Holmes, Christopher, Snow, Benjamin, Gates, James C. and Smith, Peter G.R.
(2012)
Photonic microcantilevers with interferometric Bragg grating interrogation.
IEEE Photonics Journal, 4 (5), .
(doi:10.1109/JPHOT.2012.2210396).
Abstract
Germanosilicate glass microcantilevers are fabricated featuring an integrated Fabry-Pérot interferometer. Direct UV writing of single-mode planar waveguides and Bragg gratings is combined with physical micromachining, using a precision dicing saw, to realize glass microcantilevers on a silicon platform. The device presented here has a wavelength shift force sensitivity of 330 nm/N, which is calibrated using a surface profilometer measurement and is an order of magnitude better than current state-of-the-art Bragg-grating-based sensors. The device also shows an approximately tenfold increase in amplitude modulation compared with a similar device architecture utilizing a single Gaussian-apodized Bragg grating. By forming the Fabry-Pérot cavity around the point of greatest strain, we reduce the unwanted effects of grating chirp as the cantilever is deflected and relate the performance to a mechanical model that relates cavity phase shift to deflection.
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Published date: October 2012
Organisations:
Optoelectronics Research Centre, Electronics & Computer Science
Identifiers
Local EPrints ID: 342402
URI: http://eprints.soton.ac.uk/id/eprint/342402
ISSN: 1943-0655
PURE UUID: 050960de-50d5-4470-b5f3-c7802009e594
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Date deposited: 29 Aug 2012 10:45
Last modified: 15 Mar 2024 03:27
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Contributors
Author:
Lewis G. Carpenter
Author:
Benjamin Snow
Author:
James C. Gates
Author:
Peter G.R. Smith
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