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Photonic microcantilevers with interferometric Bragg grating interrogation

Carpenter, Lewis G., Holmes, Christopher, Snow, Benjamin, Gates, James C. and Smith, Peter G.R. (2012) Photonic microcantilevers with interferometric Bragg grating interrogation IEEE Photonics Journal, 4, (5), pp. 1387-1395. (doi:10.1109/JPHOT.2012.2210396).

Record type: Article


Germanosilicate glass microcantilevers are fabricated featuring an integrated Fabry-Pérot interferometer. Direct UV writing of single-mode planar waveguides and Bragg gratings is combined with physical micromachining, using a precision dicing saw, to realize glass microcantilevers on a silicon platform. The device presented here has a wavelength shift force sensitivity of 330 nm/N, which is calibrated using a surface profilometer measurement and is an order of magnitude better than current state-of-the-art Bragg-grating-based sensors. The device also shows an approximately tenfold increase in amplitude modulation compared with a similar device architecture utilizing a single Gaussian-apodized Bragg grating. By forming the Fabry-Pérot cavity around the point of greatest strain, we reduce the unwanted effects of grating chirp as the cantilever is deflected and relate the performance to a mechanical model that relates cavity phase shift to deflection.

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Published date: October 2012
Organisations: Optoelectronics Research Centre, Electronics & Computer Science


Local EPrints ID: 342402
ISSN: 1943-0655
PURE UUID: 050960de-50d5-4470-b5f3-c7802009e594
ORCID for James C. Gates: ORCID iD

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Date deposited: 29 Aug 2012 10:45
Last modified: 17 Oct 2017 16:32

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