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Combinatorial atmospheric pressure chemical vapour deposition (cAPCVD) of a mixed vanadium oxide and vanadium oxynitride thin film

Combinatorial atmospheric pressure chemical vapour deposition (cAPCVD) of a mixed vanadium oxide and vanadium oxynitride thin film
Combinatorial atmospheric pressure chemical vapour deposition (cAPCVD) of a mixed vanadium oxide and vanadium oxynitride thin film
A novel combinatorial atmospheric pressure chemical vapour deposition (cAPCVD) technique was used to synthesise numerous vanadium oxide and vanadium oxynitride phases on a single film. This is the first example of cAPCVD having been used to synthesise a gradating mixed anion system. The film was characterised by X-ray diffraction (XRD) mapping, Raman, wavelength dispersive X-ray analysis (WDX) and X-ray photoelectron spectroscopy (XPS) analysis of positions along the film’s front edge allowed the chemical composition to be determined and correlated with XRD data. Film thicknesses were determined using side-on scanning electron microscopy (SEM). Functional property mapping of the optical transmittance/reflectance and electrical resistance allowed systematic investigation on the effects of oxygen content within a vanadium oxynitride film. cAPCVD used in conjunction with mapping analysis tools is a shortcut for identifying numerous, phases, compositions and properties and their relationships on a single film, and offers a rapid method for analysis of phase-space
1399-1408
Kafizas, Andreas
da90f0f2-948d-43b7-b01f-8cbf65b9d2eb
Hyett, Geoffrey
4f292fc9-2198-4b18-99b9-3c74e7dfed8d
Parkin, Ivan P.
7f95b9c4-1f9d-441c-8d43-ac8ea2554b85
Kafizas, Andreas
da90f0f2-948d-43b7-b01f-8cbf65b9d2eb
Hyett, Geoffrey
4f292fc9-2198-4b18-99b9-3c74e7dfed8d
Parkin, Ivan P.
7f95b9c4-1f9d-441c-8d43-ac8ea2554b85

Kafizas, Andreas, Hyett, Geoffrey and Parkin, Ivan P. (2009) Combinatorial atmospheric pressure chemical vapour deposition (cAPCVD) of a mixed vanadium oxide and vanadium oxynitride thin film. Journal of Materials Chemistry, 19 (10), 1399-1408. (doi:10.1039/b817429f).

Record type: Article

Abstract

A novel combinatorial atmospheric pressure chemical vapour deposition (cAPCVD) technique was used to synthesise numerous vanadium oxide and vanadium oxynitride phases on a single film. This is the first example of cAPCVD having been used to synthesise a gradating mixed anion system. The film was characterised by X-ray diffraction (XRD) mapping, Raman, wavelength dispersive X-ray analysis (WDX) and X-ray photoelectron spectroscopy (XPS) analysis of positions along the film’s front edge allowed the chemical composition to be determined and correlated with XRD data. Film thicknesses were determined using side-on scanning electron microscopy (SEM). Functional property mapping of the optical transmittance/reflectance and electrical resistance allowed systematic investigation on the effects of oxygen content within a vanadium oxynitride film. cAPCVD used in conjunction with mapping analysis tools is a shortcut for identifying numerous, phases, compositions and properties and their relationships on a single film, and offers a rapid method for analysis of phase-space

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Published date: 28 January 2009
Organisations: Chemistry

Identifiers

Local EPrints ID: 342667
URI: http://eprints.soton.ac.uk/id/eprint/342667
PURE UUID: 3c5d731e-ef40-42b5-8b81-80661e4006c0
ORCID for Geoffrey Hyett: ORCID iD orcid.org/0000-0001-9302-9723

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Date deposited: 12 Sep 2012 11:06
Last modified: 26 Nov 2019 01:36

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Contributors

Author: Andreas Kafizas
Author: Geoffrey Hyett ORCID iD
Author: Ivan P. Parkin

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