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Physically micromachined silica-on-silicon integrated corner mirrors

Physically micromachined silica-on-silicon integrated corner mirrors
Physically micromachined silica-on-silicon integrated corner mirrors
Turning or corner mirrors can be used to redirected light on an integrated chip, providing a route to higher density of optical components. Mirrors have been demonstrated in silicon-on-insulator with losses of 0.9dB [1] and in hollow waveguides with losses of 0.8dB [2]. We demonstrate an alternative method of fabricating mirrors on a silica-on-silicon substrate. The method employs the complimentary techniques of physical micromachining and direct UV writing, both provide rapid prototyping outside the cleanroom environment.
Carpenter, L.
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Rogers, Helen
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Holmes, C.
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Gates, J.C.
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Smith, P.G.
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Carpenter, L.
0daa548e-0d42-4b06-b914-45bfbec41759
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.
8979668a-8b7a-4838-9a74-1a7cfc6665f6

Carpenter, L., Rogers, Helen, Holmes, C., Gates, J.C. and Smith, P.G. (2011) Physically micromachined silica-on-silicon integrated corner mirrors. CLEO/EQEC 2011: Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, Munich, Germany. 22 - 26 May 2011.

Record type: Conference or Workshop Item (Paper)

Abstract

Turning or corner mirrors can be used to redirected light on an integrated chip, providing a route to higher density of optical components. Mirrors have been demonstrated in silicon-on-insulator with losses of 0.9dB [1] and in hollow waveguides with losses of 0.8dB [2]. We demonstrate an alternative method of fabricating mirrors on a silica-on-silicon substrate. The method employs the complimentary techniques of physical micromachining and direct UV writing, both provide rapid prototyping outside the cleanroom environment.

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e-pub ahead of print date: 2011
Venue - Dates: CLEO/EQEC 2011: Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, Munich, Germany, 2011-05-22 - 2011-05-26
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 343031
URI: http://eprints.soton.ac.uk/id/eprint/343031
PURE UUID: 6cf59b80-01a7-40b5-ad53-757f2d478cf9
ORCID for C. Holmes: ORCID iD orcid.org/0000-0001-9021-3760
ORCID for J.C. Gates: ORCID iD orcid.org/0000-0001-8671-5987
ORCID for P.G. Smith: ORCID iD orcid.org/0000-0003-0319-718X

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Date deposited: 20 Sep 2012 16:06
Last modified: 15 Mar 2024 03:27

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Contributors

Author: L. Carpenter
Author: Helen Rogers
Author: C. Holmes ORCID iD
Author: J.C. Gates ORCID iD
Author: P.G. Smith ORCID iD

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