The University of Southampton
University of Southampton Institutional Repository

Physically micromachined silica-on-silicon integrated corner mirrors

Physically micromachined silica-on-silicon integrated corner mirrors
Physically micromachined silica-on-silicon integrated corner mirrors
Turning or corner mirrors can be used to redirected light on an integrated chip, providing a route to higher density of optical components. Mirrors have been demonstrated in silicon-on-insulator with losses of 0.9dB [1] and in hollow waveguides with losses of 0.8dB [2]. We demonstrate an alternative method of fabricating mirrors on a silica-on-silicon substrate. The method employs the complimentary techniques of physical micromachining and direct UV writing, both provide rapid prototyping outside the cleanroom environment.
Carpenter, L.
0daa548e-0d42-4b06-b914-45bfbec41759
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Carpenter, L.
0daa548e-0d42-4b06-b914-45bfbec41759
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.
8979668a-8b7a-4838-9a74-1a7cfc6665f6

Carpenter, L., Rogers, Helen, Holmes, C., Gates, J.C. and Smith, P.G. (2011) Physically micromachined silica-on-silicon integrated corner mirrors. CLEO/EQEC 2011: Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, Germany. 22 - 26 May 2011.

Record type: Conference or Workshop Item (Paper)

Abstract

Turning or corner mirrors can be used to redirected light on an integrated chip, providing a route to higher density of optical components. Mirrors have been demonstrated in silicon-on-insulator with losses of 0.9dB [1] and in hollow waveguides with losses of 0.8dB [2]. We demonstrate an alternative method of fabricating mirrors on a silica-on-silicon substrate. The method employs the complimentary techniques of physical micromachining and direct UV writing, both provide rapid prototyping outside the cleanroom environment.

Text
4976.pdf - Other
Download (110kB)

More information

e-pub ahead of print date: 2011
Venue - Dates: CLEO/EQEC 2011: Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, Germany, 2011-05-22 - 2011-05-26
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 343031
URI: https://eprints.soton.ac.uk/id/eprint/343031
PURE UUID: 6cf59b80-01a7-40b5-ad53-757f2d478cf9
ORCID for C. Holmes: ORCID iD orcid.org/0000-0001-9021-3760
ORCID for J.C. Gates: ORCID iD orcid.org/0000-0001-8671-5987
ORCID for P.G. Smith: ORCID iD orcid.org/0000-0003-0319-718X

Catalogue record

Date deposited: 20 Sep 2012 16:06
Last modified: 17 Oct 2019 00:38

Export record

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×