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Integrated optic glass microcantilever with Bragg gratings forming a Fabry-Pérot interferometer for force sensing

Integrated optic glass microcantilever with Bragg gratings forming a Fabry-Pérot interferometer for force sensing
Integrated optic glass microcantilever with Bragg gratings forming a Fabry-Pérot interferometer for force sensing
Microcantilevers are the workhorse for ultra sensitive force sensors and are used in applications such as atomic force microscopy, sensing forces as small as 10pN [1]. In previous work [2] we have demonstrated the first integrated optical glass microcantilever, and we now show for the first time Bragg gratings forming a Fabry-Pérot interferometer acting to increase the force-sensitivity of the device. The fabrication of the glass microcantilever is based on a novel physical micromachining and etching approach, combined with UV written Bragg gratings. The advantages of the in-situ Fabry-Pérot interferometer will also be discussed.
CK5_6
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2

Carpenter, Lewis, Holmes, Christopher, Smith, Peter G.R. and Gates, James C. (2011) Integrated optic glass microcantilever with Bragg gratings forming a Fabry-Pérot interferometer for force sensing. European Conference on Lasers and Electro-Optics (CLEO/Europe-EQEC), Germany. 22 - 26 May 2011. CK5_6 .

Record type: Conference or Workshop Item (Paper)

Abstract

Microcantilevers are the workhorse for ultra sensitive force sensors and are used in applications such as atomic force microscopy, sensing forces as small as 10pN [1]. In previous work [2] we have demonstrated the first integrated optical glass microcantilever, and we now show for the first time Bragg gratings forming a Fabry-Pérot interferometer acting to increase the force-sensitivity of the device. The fabrication of the glass microcantilever is based on a novel physical micromachining and etching approach, combined with UV written Bragg gratings. The advantages of the in-situ Fabry-Pérot interferometer will also be discussed.

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More information

e-pub ahead of print date: 2011
Published date: 22 May 2011
Venue - Dates: European Conference on Lasers and Electro-Optics (CLEO/Europe-EQEC), Germany, 2011-05-22 - 2011-05-26
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 343032
URI: https://eprints.soton.ac.uk/id/eprint/343032
PURE UUID: b4fd45e1-4ff7-4269-b15d-eeb0a95cb7f3
ORCID for James C. Gates: ORCID iD orcid.org/0000-0001-8671-5987

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Date deposited: 21 Sep 2012 08:13
Last modified: 20 Jul 2019 01:06

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