A novel fabrication process to realise piezoelectric cantilever structures for smart fabric sensor applications


Wei, Yang, Torah, Russel, Yang, Kai, Beeby, Steve and Tudor, John (2012) A novel fabrication process to realise piezoelectric cantilever structures for smart fabric sensor applications At IEEE Sensors 2012, Taiwan, Province of China. 28 - 31 Oct 2012. 4 pp.

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Description/Abstract

This paper reports a novel process for realising freestanding piezoelectric cantilevers printed on fabric for potential use as a wearable sensor. Piezoelectric cantilever structures were fabricated by screen printing a piezoelectric stack on top of a structural layer that is supported by a sacrificial material during printing. The sacrificial layer was subsequently removed in an oven at 160 °C for 30 minutes which is sufficient to fully release the cantilever beam from the substrate. The samples were polarised by applying an electric field across the piezoelectric stack. Testing on an electromechanical shaker shows that the cantilevers have resonant frequencies at 390 and 260 Hz for beam lengths of 12 and 15 mm, respectively. The beams produced maximum outputs of 38 and 27 mV at an acceleration of 11.76 m/s2, respectively

Item Type: Conference or Workshop Item (Paper)
Venue - Dates: IEEE Sensors 2012, Taiwan, Province of China, 2012-10-28 - 2012-10-31
Related URLs:
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Organisations: EEE
ePrint ID: 344907
Date :
Date Event
29 October 2012Published
Date Deposited: 08 Nov 2012 10:06
Last Modified: 23 Feb 2017 06:21
Projects:
Micro fabrication production technology for MEMS on new emerging smart textiles/flexibles (MICROFLEX)
Funded by: European Commission - FP7 (211335)
1 November 2008 to 31 October 2012
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/344907

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