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Very low energy implanted Bragg gratings in SOI for wafer scale testing applications

Very low energy implanted Bragg gratings in SOI for wafer scale testing applications
Very low energy implanted Bragg gratings in SOI for wafer scale testing applications
We present Bragg gratings with an effective index change introduced by implanting germanium at only 15KeV. An extinction ratio of 35dB at 1350nm is demonstrated for device lengths of 600µm, furthermore laser annealing is demonstrated.
978-1-4244-8338-9
51-53
Loiacono, Renzo
bd4e12f9-9adc-4d25-9a7b-d3a4f1da3735
Topley, Rob
f43e052f-31c2-47a5-a627-3ce44fbc99a1
Nakyobe, Agnes
61562c31-73f2-4a2e-a3c5-6120fd634a08
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051
Gwilliam, Russell
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Lulli, Giogio
c79d51fb-20ca-4cc6-ab8b-06f16dc1bdbe
Feldesh, Ran
443c53a2-dbd9-44a9-8230-069ebcfffdb3
Jones, Richard
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Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Loiacono, Renzo
bd4e12f9-9adc-4d25-9a7b-d3a4f1da3735
Topley, Rob
f43e052f-31c2-47a5-a627-3ce44fbc99a1
Nakyobe, Agnes
61562c31-73f2-4a2e-a3c5-6120fd634a08
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051
Gwilliam, Russell
05728edb-27e0-4939-8b23-5d76f33786d6
Lulli, Giogio
c79d51fb-20ca-4cc6-ab8b-06f16dc1bdbe
Feldesh, Ran
443c53a2-dbd9-44a9-8230-069ebcfffdb3
Jones, Richard
9d9f872b-9caa-442a-aef0-c6f14826ef55
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139

Loiacono, Renzo, Topley, Rob, Nakyobe, Agnes, Mashanovich, Goran Z., Gwilliam, Russell, Lulli, Giogio, Feldesh, Ran, Jones, Richard and Reed, Graham T. (2011) Very low energy implanted Bragg gratings in SOI for wafer scale testing applications. 8th IEEE International Conference on Group IV Photonics, London, United Kingdom. 14 - 16 Sep 2011. pp. 51-53 . (doi:10.1109/GROUP4.2011.6053712).

Record type: Conference or Workshop Item (Paper)

Abstract

We present Bragg gratings with an effective index change introduced by implanting germanium at only 15KeV. An extinction ratio of 35dB at 1350nm is demonstrated for device lengths of 600µm, furthermore laser annealing is demonstrated.

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More information

e-pub ahead of print date: 16 September 2011
Published date: 1 November 2011
Venue - Dates: 8th IEEE International Conference on Group IV Photonics, London, United Kingdom, 2011-09-14 - 2011-09-16
Organisations: Optoelectronics Research Centre, Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 345229
URI: https://eprints.soton.ac.uk/id/eprint/345229
ISBN: 978-1-4244-8338-9
PURE UUID: 3ab628aa-6f56-4667-ac19-997ab326c7c1

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Date deposited: 14 Nov 2012 13:39
Last modified: 19 Jul 2019 21:49

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Contributors

Author: Renzo Loiacono
Author: Rob Topley
Author: Agnes Nakyobe
Author: Russell Gwilliam
Author: Giogio Lulli
Author: Ran Feldesh
Author: Richard Jones
Author: Graham T. Reed

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