ECDM methods for fluidic interfacing through thin glass substrates and the formation of spherical microcavities
ECDM methods for fluidic interfacing through thin glass substrates and the formation of spherical microcavities
Electrochemical discharge machining (ECDM) involves the electrolytic formation of a gas film at a tool electrode with high current density discharges and Joule heating for local material heating and removal. The ECDM process is ideally suited for low density glass through-hole machining for applications such as fluidic interconnection. In this paper, we describe a simple and robust ECDM cell arrangement and present optimum conditions for rapid and reproducible through-hole machining in both 500 mu m thick and fragile 180 mu m thin borosilicate glass substrates. Both anodic and cathodic methods were evaluated and the results offer additional insight into the complex and polarity-dependent mechanisms involved in the ECDM process. The anodic process produces unique spherical cavity microstructures, presenting a new capability for glass microfabrication.
chemical engraving, sace, experimental-verification, theoretical-model, spark, microfabrication, mechanism, chips, tool
403-409
West, Jonathan
f1c2e060-16c3-44c0-af70-242a1c58b968
Jadhav, Amol
c472b98d-4656-4b43-9cfd-37d01add8183
2007
West, Jonathan
f1c2e060-16c3-44c0-af70-242a1c58b968
Jadhav, Amol
c472b98d-4656-4b43-9cfd-37d01add8183
West, Jonathan and Jadhav, Amol
(2007)
ECDM methods for fluidic interfacing through thin glass substrates and the formation of spherical microcavities.
Journal of Micromechanics and Microengineering, 17 (2), .
(doi:10.1088/0960-1317/17/2/028).
Abstract
Electrochemical discharge machining (ECDM) involves the electrolytic formation of a gas film at a tool electrode with high current density discharges and Joule heating for local material heating and removal. The ECDM process is ideally suited for low density glass through-hole machining for applications such as fluidic interconnection. In this paper, we describe a simple and robust ECDM cell arrangement and present optimum conditions for rapid and reproducible through-hole machining in both 500 mu m thick and fragile 180 mu m thin borosilicate glass substrates. Both anodic and cathodic methods were evaluated and the results offer additional insight into the complex and polarity-dependent mechanisms involved in the ECDM process. The anodic process produces unique spherical cavity microstructures, presenting a new capability for glass microfabrication.
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Published date: 2007
Keywords:
chemical engraving, sace, experimental-verification, theoretical-model, spark, microfabrication, mechanism, chips, tool
Organisations:
Cancer Sciences
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Local EPrints ID: 346434
URI: http://eprints.soton.ac.uk/id/eprint/346434
ISSN: 0960-1317
PURE UUID: b2e6a933-50a8-47d6-bfbb-f39c728e8dfd
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Date deposited: 26 Feb 2013 14:05
Last modified: 15 Mar 2024 03:43
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Author:
Amol Jadhav
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