The University of Southampton
University of Southampton Institutional Repository

ECDM methods for fluidic interfacing through thin glass substrates and the formation of spherical microcavities

ECDM methods for fluidic interfacing through thin glass substrates and the formation of spherical microcavities
ECDM methods for fluidic interfacing through thin glass substrates and the formation of spherical microcavities
Electrochemical discharge machining (ECDM) involves the electrolytic formation of a gas film at a tool electrode with high current density discharges and Joule heating for local material heating and removal. The ECDM process is ideally suited for low density glass through-hole machining for applications such as fluidic interconnection. In this paper, we describe a simple and robust ECDM cell arrangement and present optimum conditions for rapid and reproducible through-hole machining in both 500 mu m thick and fragile 180 mu m thin borosilicate glass substrates. Both anodic and cathodic methods were evaluated and the results offer additional insight into the complex and polarity-dependent mechanisms involved in the ECDM process. The anodic process produces unique spherical cavity microstructures, presenting a new capability for glass microfabrication.
chemical engraving, sace, experimental-verification, theoretical-model, spark, microfabrication, mechanism, chips, tool
0960-1317
403-409
West, Jonathan
f1c2e060-16c3-44c0-af70-242a1c58b968
Jadhav, Amol
c472b98d-4656-4b43-9cfd-37d01add8183
West, Jonathan
f1c2e060-16c3-44c0-af70-242a1c58b968
Jadhav, Amol
c472b98d-4656-4b43-9cfd-37d01add8183

West, Jonathan and Jadhav, Amol (2007) ECDM methods for fluidic interfacing through thin glass substrates and the formation of spherical microcavities. Journal of Micromechanics and Microengineering, 17 (2), 403-409. (doi:10.1088/0960-1317/17/2/028).

Record type: Article

Abstract

Electrochemical discharge machining (ECDM) involves the electrolytic formation of a gas film at a tool electrode with high current density discharges and Joule heating for local material heating and removal. The ECDM process is ideally suited for low density glass through-hole machining for applications such as fluidic interconnection. In this paper, we describe a simple and robust ECDM cell arrangement and present optimum conditions for rapid and reproducible through-hole machining in both 500 mu m thick and fragile 180 mu m thin borosilicate glass substrates. Both anodic and cathodic methods were evaluated and the results offer additional insight into the complex and polarity-dependent mechanisms involved in the ECDM process. The anodic process produces unique spherical cavity microstructures, presenting a new capability for glass microfabrication.

This record has no associated files available for download.

More information

Published date: 2007
Keywords: chemical engraving, sace, experimental-verification, theoretical-model, spark, microfabrication, mechanism, chips, tool
Organisations: Cancer Sciences

Identifiers

Local EPrints ID: 346434
URI: http://eprints.soton.ac.uk/id/eprint/346434
ISSN: 0960-1317
PURE UUID: b2e6a933-50a8-47d6-bfbb-f39c728e8dfd
ORCID for Jonathan West: ORCID iD orcid.org/0000-0002-5709-6790

Catalogue record

Date deposited: 26 Feb 2013 14:05
Last modified: 15 Mar 2024 03:43

Export record

Altmetrics

Contributors

Author: Jonathan West ORCID iD
Author: Amol Jadhav

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×