The University of Southampton
University of Southampton Institutional Repository

A combinatorial approach to phase synthesis and characterisation in atmospheric pressure chemical vapour deposition

A combinatorial approach to phase synthesis and characterisation in atmospheric pressure chemical vapour deposition
A combinatorial approach to phase synthesis and characterisation in atmospheric pressure chemical vapour deposition
A combinatorial approach to synthesis has been successfully applied to a number of areas of chemistry and materials. This approach is always composed of two key stages, firstly the simultaneous synthesis of a large number of compounds, often within a grid of micro-reactors, or across a substrate with a compositional gradient; and secondly an analytical technique that can rapidly investigate a desired property and compare the results for the compositional range.

In this paper we present the results of a combinatorial approach to Atmospheric Pressure Chemical Vapour Deposition. By using a modified reactor with multiple reagent entry points, and introducing reagents into the reactor through these asymmetrically, a compositional gradient across a deposited film can be formed. The technique will be demonstrated with examples of titanium and tungsten oxides. The rapid analytical method used, the second key step in a combinatorial synthesis, is micro-focus X-ray diffraction mapping, and this will also be discussed.
combinatorial, X-ray diffraction, chemical vapour deposition, thin film, titanium dioxide, tungsten oxide
0257-8972
8966-8970
Hyett, Geoffrey
4f292fc9-2198-4b18-99b9-3c74e7dfed8d
Parkin, Ivan P.
7f95b9c4-1f9d-441c-8d43-ac8ea2554b85
Hyett, Geoffrey
4f292fc9-2198-4b18-99b9-3c74e7dfed8d
Parkin, Ivan P.
7f95b9c4-1f9d-441c-8d43-ac8ea2554b85

Hyett, Geoffrey and Parkin, Ivan P. (2007) A combinatorial approach to phase synthesis and characterisation in atmospheric pressure chemical vapour deposition. [in special issue: Euro CVD 16: 16th European Conference on Chemical Vapor Deposition] Surface and Coatings Technology, 201 (22-23), 8966-8970. (doi:10.1016/j.surfcoat.2007.04.058).

Record type: Article

Abstract

A combinatorial approach to synthesis has been successfully applied to a number of areas of chemistry and materials. This approach is always composed of two key stages, firstly the simultaneous synthesis of a large number of compounds, often within a grid of micro-reactors, or across a substrate with a compositional gradient; and secondly an analytical technique that can rapidly investigate a desired property and compare the results for the compositional range.

In this paper we present the results of a combinatorial approach to Atmospheric Pressure Chemical Vapour Deposition. By using a modified reactor with multiple reagent entry points, and introducing reagents into the reactor through these asymmetrically, a compositional gradient across a deposited film can be formed. The technique will be demonstrated with examples of titanium and tungsten oxides. The rapid analytical method used, the second key step in a combinatorial synthesis, is micro-focus X-ray diffraction mapping, and this will also be discussed.

This record has no associated files available for download.

More information

Published date: 25 September 2007
Keywords: combinatorial, X-ray diffraction, chemical vapour deposition, thin film, titanium dioxide, tungsten oxide
Organisations: Organic Chemistry: Synthesis, Catalysis and Flow

Identifiers

Local EPrints ID: 346997
URI: http://eprints.soton.ac.uk/id/eprint/346997
ISSN: 0257-8972
PURE UUID: 7ed0ab97-6f2c-4cdb-bc91-a37053638d8d
ORCID for Geoffrey Hyett: ORCID iD orcid.org/0000-0001-9302-9723

Catalogue record

Date deposited: 14 Feb 2013 16:42
Last modified: 15 Mar 2024 03:45

Export record

Altmetrics

Contributors

Author: Geoffrey Hyett ORCID iD
Author: Ivan P. Parkin

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×