The effect of film thickness on the suitability of titanium oxynitride (TiNxOy,x +y = 1) films as heat mirrors – formed by the atmospheric pressure CVD of TiCl4 and NH3
The effect of film thickness on the suitability of titanium oxynitride (TiNxOy,x +y = 1) films as heat mirrors – formed by the atmospheric pressure CVD of TiCl4 and NH3
Films of titanium oxynitride are assessed for their potential as heat mirror coatings oil window glass, as a function of the film thickness. The coatings are deposited from the atmospheric pressure (AP) chemical vapor reaction of TiCl4 and ammonia. The heat mirror properties are evaluated using transmission and reflection spectroscopy. The composition of the samples is determined by X-ray photoelectron spectroscopy (XPS), and the thickness of the films by scanning electron microscopy (SEM). These results suggest that an effective heat mirror can be formed by a 100 nm thick coating of titanium oxynitride, which has a transmission of 49 % in the visible (6 10 nm), and a reflection of 46 % in the near infrared (1320 nm).
coatings, low-pressure cvd, titanium oxynitride
675-679
Hyett, G.
4f292fc9-2198-4b18-99b9-3c74e7dfed8d
Binions, R.
a2322a14-a7fa-44b2-bbd2-709e883fe42e
Parkin, I.P.
dad9ddcd-12a3-4365-b156-48eff153c48c
December 2007
Hyett, G.
4f292fc9-2198-4b18-99b9-3c74e7dfed8d
Binions, R.
a2322a14-a7fa-44b2-bbd2-709e883fe42e
Parkin, I.P.
dad9ddcd-12a3-4365-b156-48eff153c48c
Hyett, G., Binions, R. and Parkin, I.P.
(2007)
The effect of film thickness on the suitability of titanium oxynitride (TiNxOy,x +y = 1) films as heat mirrors – formed by the atmospheric pressure CVD of TiCl4 and NH3.
Chemical Vapor Deposition, 13 (12), .
(doi:10.1002/cvde.200706638).
Abstract
Films of titanium oxynitride are assessed for their potential as heat mirror coatings oil window glass, as a function of the film thickness. The coatings are deposited from the atmospheric pressure (AP) chemical vapor reaction of TiCl4 and ammonia. The heat mirror properties are evaluated using transmission and reflection spectroscopy. The composition of the samples is determined by X-ray photoelectron spectroscopy (XPS), and the thickness of the films by scanning electron microscopy (SEM). These results suggest that an effective heat mirror can be formed by a 100 nm thick coating of titanium oxynitride, which has a transmission of 49 % in the visible (6 10 nm), and a reflection of 46 % in the near infrared (1320 nm).
This record has no associated files available for download.
More information
e-pub ahead of print date: 7 December 2007
Published date: December 2007
Keywords:
coatings, low-pressure cvd, titanium oxynitride
Organisations:
Organic Chemistry: Synthesis, Catalysis and Flow
Identifiers
Local EPrints ID: 347000
URI: http://eprints.soton.ac.uk/id/eprint/347000
ISSN: 0948-1907
PURE UUID: a2b0a92d-cb8f-4b1f-b4f1-2acb834d0a19
Catalogue record
Date deposited: 14 Feb 2013 16:48
Last modified: 15 Mar 2024 03:45
Export record
Altmetrics
Contributors
Author:
R. Binions
Author:
I.P. Parkin
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics
