The preparation of titanium dioxide gas sensors by the electric field assisted aerosol CVD reaction of titanium isopropoxide in toluene
The preparation of titanium dioxide gas sensors by the electric field assisted aerosol CVD reaction of titanium isopropoxide in toluene
Thin films of titanium dioxide are deposited on gas-sensor substrates at 450?degrees C from the aerosol-assisted (AA)CVD of titanium isopropoxide solutions in toluene under the influence of electric fields. Electric fields are generated by applying a potential difference between the inter-digitated electrodes of the gas-sensor substrate during the deposition. The deposited films are analyzed and characterized using scanning electron microscopy (SEM), X-ray diffraction (XRD), and Raman spectroscopy (RS). It is found that an increase in electric field strength during deposition causes changes in the film microstructure, preferential orientation, and growth rate. The gas-sensor properties of the films are also examined. It is found that applying an electric field during the deposition improves the film microstructure and leads to a two-fold enhancement in the sensing properties of the film.
aacvd, electric field, gas sensor, titanium dioxide
102-106
Panjawi, Naitik
19e12760-b0d1-47ff-834b-4e9ad5cc87f7
Naik, Anupriya
b9fc1bc7-04d8-43ff-a4c3-bd1ec00d5ca1
Warwick, Michael E.A.
8e737daf-e5a0-483d-a904-456f5128c45e
Hyett, Geoffrey
4f292fc9-2198-4b18-99b9-3c74e7dfed8d
Binions, Russell
fb23aa39-388f-4883-9264-97e93d3578e2
June 2012
Panjawi, Naitik
19e12760-b0d1-47ff-834b-4e9ad5cc87f7
Naik, Anupriya
b9fc1bc7-04d8-43ff-a4c3-bd1ec00d5ca1
Warwick, Michael E.A.
8e737daf-e5a0-483d-a904-456f5128c45e
Hyett, Geoffrey
4f292fc9-2198-4b18-99b9-3c74e7dfed8d
Binions, Russell
fb23aa39-388f-4883-9264-97e93d3578e2
Panjawi, Naitik, Naik, Anupriya, Warwick, Michael E.A., Hyett, Geoffrey and Binions, Russell
(2012)
The preparation of titanium dioxide gas sensors by the electric field assisted aerosol CVD reaction of titanium isopropoxide in toluene.
Chemical Vapor Deposition, 18 (4-6), .
(doi:10.1002/cvde.201106973).
Abstract
Thin films of titanium dioxide are deposited on gas-sensor substrates at 450?degrees C from the aerosol-assisted (AA)CVD of titanium isopropoxide solutions in toluene under the influence of electric fields. Electric fields are generated by applying a potential difference between the inter-digitated electrodes of the gas-sensor substrate during the deposition. The deposited films are analyzed and characterized using scanning electron microscopy (SEM), X-ray diffraction (XRD), and Raman spectroscopy (RS). It is found that an increase in electric field strength during deposition causes changes in the film microstructure, preferential orientation, and growth rate. The gas-sensor properties of the films are also examined. It is found that applying an electric field during the deposition improves the film microstructure and leads to a two-fold enhancement in the sensing properties of the film.
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More information
e-pub ahead of print date: 10 May 2012
Published date: June 2012
Additional Information:
Funded by EPSRC: Chemical Vapour Deposition in Applied Electric Fields. (EP/H005803/1)
Keywords:
aacvd, electric field, gas sensor, titanium dioxide
Organisations:
Organic Chemistry: Synthesis, Catalysis and Flow
Identifiers
Local EPrints ID: 347031
URI: http://eprints.soton.ac.uk/id/eprint/347031
ISSN: 0948-1907
PURE UUID: 859cc841-d221-4607-931c-0c90b0209472
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Date deposited: 21 Jan 2013 09:51
Last modified: 15 Mar 2024 03:45
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Contributors
Author:
Naitik Panjawi
Author:
Anupriya Naik
Author:
Michael E.A. Warwick
Author:
Russell Binions
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