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Stable zipping RF MEMS varactors

Stable zipping RF MEMS varactors
Stable zipping RF MEMS varactors
Novel zipper varactors with the potential for achieving large tuning ranges have been fabricated and characterized. These varactors have a curved cantilever electrode that is actuated by a single pull-down electrode. The shape of the cantilever is designed such that its local stiffness is tailored to enable extended stable zipping. In a series-mounted varactor, the measured capacitance ratio was 16.5 for actuation voltages between 0 and 46 V. However, the presence of an unexpected tuning instability at 32 V bias limited the practical tuning range in this varactor. This behaviour was attributed to fabrication imperfections. The first electrical self-resonant frequency of the same varactor was extrapolated to be 72.6 and 17.2 GHz at 20 and 329 fF, respectively. In a different shunt-mounted varactor, the quality factor (Q) was measured to be 91 (60 fF) and 176 (600 fF) at 2 GHz. Including the anchor, the varactors have a small device footprint and fit within an area of 500 by 100 µm.
0960-1317
Pu, Suan-Hui
75e2711b-094d-4c38-8f08-65ee1377bc28
Holmes, Andrew S.
be2dbd21-2b84-4fa6-b743-e3c23f9a6bdb
Yeatman, Eric M.
cfcf6b8a-a153-41a6-bdf4-dc5e5ff70b3b
Papavassiliou, Christos
e51de0f1-db39-4e1f-ac66-8e10a2d282b9
Lucyszyn, Stepan
8a974e18-d356-484e-b0d0-a1728bb86704
Pu, Suan-Hui
75e2711b-094d-4c38-8f08-65ee1377bc28
Holmes, Andrew S.
be2dbd21-2b84-4fa6-b743-e3c23f9a6bdb
Yeatman, Eric M.
cfcf6b8a-a153-41a6-bdf4-dc5e5ff70b3b
Papavassiliou, Christos
e51de0f1-db39-4e1f-ac66-8e10a2d282b9
Lucyszyn, Stepan
8a974e18-d356-484e-b0d0-a1728bb86704

Pu, Suan-Hui, Holmes, Andrew S., Yeatman, Eric M., Papavassiliou, Christos and Lucyszyn, Stepan (2010) Stable zipping RF MEMS varactors Journal of Micromechanics and Microengineering, 20, (3) (doi:10.1088/0960-1317/20/3/035030).

Record type: Article

Abstract

Novel zipper varactors with the potential for achieving large tuning ranges have been fabricated and characterized. These varactors have a curved cantilever electrode that is actuated by a single pull-down electrode. The shape of the cantilever is designed such that its local stiffness is tailored to enable extended stable zipping. In a series-mounted varactor, the measured capacitance ratio was 16.5 for actuation voltages between 0 and 46 V. However, the presence of an unexpected tuning instability at 32 V bias limited the practical tuning range in this varactor. This behaviour was attributed to fabrication imperfections. The first electrical self-resonant frequency of the same varactor was extrapolated to be 72.6 and 17.2 GHz at 20 and 329 fF, respectively. In a different shunt-mounted varactor, the quality factor (Q) was measured to be 91 (60 fF) and 176 (600 fF) at 2 GHz. Including the anchor, the varactors have a small device footprint and fit within an area of 500 by 100 µm.

Text 2010_JMM_Zipping_Varactor.pdf - Version of Record
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More information

Submitted date: 25 August 2009
Published date: 2 March 2010
Additional Information: Funded by EPSRC: Integrated Functional Materials for System-in-Package Applications (EP/D064805/1)
Organisations: Nanoelectronics and Nanotechnology, Mechatronics, Engineering Science Unit

Identifiers

Local EPrints ID: 347517
URI: http://eprints.soton.ac.uk/id/eprint/347517
ISSN: 0960-1317
PURE UUID: c9258e6e-3029-4a2d-85b1-2543b2236aee

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Date deposited: 30 Jan 2013 12:22
Last modified: 08 Dec 2017 17:31

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Contributors

Author: Suan-Hui Pu
Author: Andrew S. Holmes
Author: Eric M. Yeatman
Author: Christos Papavassiliou
Author: Stepan Lucyszyn

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