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Sub-micron-scale femtosecond laser ablation using a digital micromirror device

Sub-micron-scale femtosecond laser ablation using a digital micromirror device
Sub-micron-scale femtosecond laser ablation using a digital micromirror device
Commercial digital multimirror devices offer a cheap and effective alternative to more expensive spatial light modulators for ablation via beam shaping. Here we present femtosecond laser ablation using the digital multimirror device from an Acer C20 Pico Digital Light Projector and show ablation of complex features with feature sizes ranging from sub-wavelength (400 nm) up to ~30 µm. Simulations are presented that have been used to optimize and understand the experimentally observed resolution.
0960-1317
Mills, B.
05f1886e-96ef-420f-b856-4115f4ab36d0
Feinäugle, M.
ecc77723-f79d-4d48-8976-d7683cca124c
Sones, C.L.
9de9d8ee-d394-46a5-80b7-e341c0eed0a8
Rizvi, N.
d46ab684-2b64-4336-8807-3cb39db9362c
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Mills, B.
05f1886e-96ef-420f-b856-4115f4ab36d0
Feinäugle, M.
ecc77723-f79d-4d48-8976-d7683cca124c
Sones, C.L.
9de9d8ee-d394-46a5-80b7-e341c0eed0a8
Rizvi, N.
d46ab684-2b64-4336-8807-3cb39db9362c
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020

Mills, B., Feinäugle, M., Sones, C.L., Rizvi, N. and Eason, R.W. (2013) Sub-micron-scale femtosecond laser ablation using a digital micromirror device. Journal of Micromechanics and Microengineering, 23 (3), [35005]. (doi:10.1088/0960-1317/23/3/035005).

Record type: Article

Abstract

Commercial digital multimirror devices offer a cheap and effective alternative to more expensive spatial light modulators for ablation via beam shaping. Here we present femtosecond laser ablation using the digital multimirror device from an Acer C20 Pico Digital Light Projector and show ablation of complex features with feature sizes ranging from sub-wavelength (400 nm) up to ~30 µm. Simulations are presented that have been used to optimize and understand the experimentally observed resolution.

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More information

Published date: March 2013
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 347756
URI: http://eprints.soton.ac.uk/id/eprint/347756
ISSN: 0960-1317
PURE UUID: 938d3a83-bb9e-4902-a3ff-97c251436aa0
ORCID for B. Mills: ORCID iD orcid.org/0000-0002-1784-1012
ORCID for R.W. Eason: ORCID iD orcid.org/0000-0001-9704-2204

Catalogue record

Date deposited: 31 Jan 2013 13:35
Last modified: 18 Feb 2021 17:08

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