High-Q continuously tunable zipping varactors with a large tuning range
High-Q continuously tunable zipping varactors with a large tuning range
The design, simulation and fabrication of high-Q zipping MEMS varactors is presented. A novel, stable zipping design allows continuous tuning as well as a large tuning range. High quality factors can be obtained using gold electrodes in order to minimise series resistance. By incorporating a high-permittivity dielectric in the varactor, the tuning range can be greatly increased and at the same time, the device size can be reduced. A fabrication process has been developed, including pre-stressed layers to provide the initial curvature, and this has been demonstrated up to and including transfer and bonding of the top electrodes from a carrier wafer.
bonding, carrier wafer, gold electrodes, high-Q zipping mems varactors, high-permittivity dielectric, quality factors, series resistance, top electrodes, tuning range
978-1-4244-2642-3
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Laister, A.J.
d76cf240-9ff2-4f02-8d6a-f53d28ff96ee
Holmes, A.S.
08b7a295-d12e-4e18-97a9-f70a7bc9c5ba
Yeatman, E.M.
2146d398-e025-45fe-9f19-5b2d154fb63b
Miles, R.E.
aee8c401-5ff1-4f95-ac8c-1472a9b1054a
Robertson, I.D.
32cd30e8-57f7-4efd-ac08-9e786ee41935
Dou, G.
2ad7a0c2-6d9b-4f29-bb9c-2b54128d4f6f
26 May 2009
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Laister, A.J.
d76cf240-9ff2-4f02-8d6a-f53d28ff96ee
Holmes, A.S.
08b7a295-d12e-4e18-97a9-f70a7bc9c5ba
Yeatman, E.M.
2146d398-e025-45fe-9f19-5b2d154fb63b
Miles, R.E.
aee8c401-5ff1-4f95-ac8c-1472a9b1054a
Robertson, I.D.
32cd30e8-57f7-4efd-ac08-9e786ee41935
Dou, G.
2ad7a0c2-6d9b-4f29-bb9c-2b54128d4f6f
Pu, Suan-Hui, Laister, A.J., Holmes, A.S., Yeatman, E.M., Miles, R.E., Robertson, I.D. and Dou, G.
(2009)
High-Q continuously tunable zipping varactors with a large tuning range.
2008 Asia Pacific Microwave Conference (APMC 2008), Hong Kong, Hong Kong.
16 - 20 Dec 2008.
4 pp
.
(doi:10.1109/APMC.2008.4958046).
Record type:
Conference or Workshop Item
(Paper)
Abstract
The design, simulation and fabrication of high-Q zipping MEMS varactors is presented. A novel, stable zipping design allows continuous tuning as well as a large tuning range. High quality factors can be obtained using gold electrodes in order to minimise series resistance. By incorporating a high-permittivity dielectric in the varactor, the tuning range can be greatly increased and at the same time, the device size can be reduced. A fabrication process has been developed, including pre-stressed layers to provide the initial curvature, and this has been demonstrated up to and including transfer and bonding of the top electrodes from a carrier wafer.
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e-pub ahead of print date: December 2008
Published date: 26 May 2009
Additional Information:
Paper A4-21
Venue - Dates:
2008 Asia Pacific Microwave Conference (APMC 2008), Hong Kong, Hong Kong, 2008-12-16 - 2008-12-20
Keywords:
bonding, carrier wafer, gold electrodes, high-Q zipping mems varactors, high-permittivity dielectric, quality factors, series resistance, top electrodes, tuning range
Organisations:
Electronics & Computer Science, Engineering Science Unit
Identifiers
Local EPrints ID: 347796
URI: http://eprints.soton.ac.uk/id/eprint/347796
ISBN: 978-1-4244-2642-3
PURE UUID: 6abe716d-170c-43b6-91a4-27ebb93d2594
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Date deposited: 30 Jan 2013 13:00
Last modified: 15 Mar 2024 04:02
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Contributors
Author:
A.J. Laister
Author:
A.S. Holmes
Author:
E.M. Yeatman
Author:
R.E. Miles
Author:
I.D. Robertson
Author:
G. Dou
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