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High-Q continuously tunable zipping varactors with a large tuning range

High-Q continuously tunable zipping varactors with a large tuning range
High-Q continuously tunable zipping varactors with a large tuning range
The design, simulation and fabrication of high-Q zipping MEMS varactors is presented. A novel, stable zipping design allows continuous tuning as well as a large tuning range. High quality factors can be obtained using gold electrodes in order to minimise series resistance. By incorporating a high-permittivity dielectric in the varactor, the tuning range can be greatly increased and at the same time, the device size can be reduced. A fabrication process has been developed, including pre-stressed layers to provide the initial curvature, and this has been demonstrated up to and including transfer and bonding of the top electrodes from a carrier wafer.
bonding, carrier wafer, gold electrodes, high-Q zipping mems varactors, high-permittivity dielectric, quality factors, series resistance, top electrodes, tuning range
978-1-4244-2642-3
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Laister, A.J.
d76cf240-9ff2-4f02-8d6a-f53d28ff96ee
Holmes, A.S.
08b7a295-d12e-4e18-97a9-f70a7bc9c5ba
Yeatman, E.M.
2146d398-e025-45fe-9f19-5b2d154fb63b
Miles, R.E.
aee8c401-5ff1-4f95-ac8c-1472a9b1054a
Robertson, I.D.
32cd30e8-57f7-4efd-ac08-9e786ee41935
Dou, G.
2ad7a0c2-6d9b-4f29-bb9c-2b54128d4f6f
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Laister, A.J.
d76cf240-9ff2-4f02-8d6a-f53d28ff96ee
Holmes, A.S.
08b7a295-d12e-4e18-97a9-f70a7bc9c5ba
Yeatman, E.M.
2146d398-e025-45fe-9f19-5b2d154fb63b
Miles, R.E.
aee8c401-5ff1-4f95-ac8c-1472a9b1054a
Robertson, I.D.
32cd30e8-57f7-4efd-ac08-9e786ee41935
Dou, G.
2ad7a0c2-6d9b-4f29-bb9c-2b54128d4f6f

Pu, Suan-Hui, Laister, A.J., Holmes, A.S., Yeatman, E.M., Miles, R.E., Robertson, I.D. and Dou, G. (2009) High-Q continuously tunable zipping varactors with a large tuning range. 2008 Asia Pacific Microwave Conference (APMC 2008), Hong Kong. 16 - 20 Dec 2008. 4 pp . (doi:10.1109/APMC.2008.4958046).

Record type: Conference or Workshop Item (Paper)

Abstract

The design, simulation and fabrication of high-Q zipping MEMS varactors is presented. A novel, stable zipping design allows continuous tuning as well as a large tuning range. High quality factors can be obtained using gold electrodes in order to minimise series resistance. By incorporating a high-permittivity dielectric in the varactor, the tuning range can be greatly increased and at the same time, the device size can be reduced. A fabrication process has been developed, including pre-stressed layers to provide the initial curvature, and this has been demonstrated up to and including transfer and bonding of the top electrodes from a carrier wafer.

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e-pub ahead of print date: December 2008
Published date: 26 May 2009
Additional Information: Paper A4-21
Venue - Dates: 2008 Asia Pacific Microwave Conference (APMC 2008), Hong Kong, 2008-12-16 - 2008-12-20
Keywords: bonding, carrier wafer, gold electrodes, high-Q zipping mems varactors, high-permittivity dielectric, quality factors, series resistance, top electrodes, tuning range
Organisations: Electronics & Computer Science, Engineering Science Unit

Identifiers

Local EPrints ID: 347796
URI: https://eprints.soton.ac.uk/id/eprint/347796
ISBN: 978-1-4244-2642-3
PURE UUID: 6abe716d-170c-43b6-91a4-27ebb93d2594
ORCID for Suan-Hui Pu: ORCID iD orcid.org/0000-0002-3335-8880

Catalogue record

Date deposited: 30 Jan 2013 13:00
Last modified: 20 Jul 2019 00:23

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Contributors

Author: Suan-Hui Pu ORCID iD
Author: A.J. Laister
Author: A.S. Holmes
Author: E.M. Yeatman
Author: R.E. Miles
Author: I.D. Robertson
Author: G. Dou

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