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Fully differential electro-mechanical phase locked loop sensor circuit

Fully differential electro-mechanical phase locked loop sensor circuit
Fully differential electro-mechanical phase locked loop sensor circuit
Embedding a micro-machined sensing element in a closed loop, force feedback system is a technique commonly used to realise high performance MEMS (micro-electro-mechanical systems) sensors due to the advantages of better linearity, increased dynamic range and reduced parameter sensitivity. Electro-mechanical Sigma Delta modulators (EMΣΔ) have been proposed for this reason and high order loops have been shown to enjoy a good signal to noise ratio (SNR) of more than 100dB. It is also well known that achieving stability in high order EMΣΔs is a challenging task and in practice stability can be lost with large input signals or due to non-ideal effects in the circuits implemented. In this work we propose a novel dfferential frequency domain technique for closed loop control of micro-machined sensors. This method, called the electro-mechanical phase locked loop (EMPLL), uses a differential electro-mechanical phase locked loop to control and measure the detection of micro-machined sensors. We believe that EMPLLs have the potential to have significant advantages over EMΣΔs for high performance MEMS sensors. Preliminary research suggests that this novel approach will lead to significant benefits in Signal to Noise Ratio, Parameter Sensitivity, and Input Signal Range.
0924-4247
240-246
Wilson, Peter R.
8a65c092-c197-4f43-b8fc-e12977783cb3
Rudolf, Robert
83a73233-ff6f-4d49-919c-c59f4b31c196
Li, Ke
dd788ca7-0a39-4364-b4b8-65f0bb93340f
Wilcock, Reuben
039894e9-f32d-49e0-9ebd-fb13bc489feb
Brown, Andrew D.
5c19e523-65ec-499b-9e7c-91522017d7e0
Harris, Nick
237cfdbd-86e4-4025-869c-c85136f14dfd
Wilson, Peter R.
8a65c092-c197-4f43-b8fc-e12977783cb3
Rudolf, Robert
83a73233-ff6f-4d49-919c-c59f4b31c196
Li, Ke
dd788ca7-0a39-4364-b4b8-65f0bb93340f
Wilcock, Reuben
039894e9-f32d-49e0-9ebd-fb13bc489feb
Brown, Andrew D.
5c19e523-65ec-499b-9e7c-91522017d7e0
Harris, Nick
237cfdbd-86e4-4025-869c-c85136f14dfd

Wilson, Peter R., Rudolf, Robert, Li, Ke, Wilcock, Reuben, Brown, Andrew D. and Harris, Nick (2013) Fully differential electro-mechanical phase locked loop sensor circuit. Sensors and Actuators A: Physical, 194 (1), 240-246. (doi:10.1016/j.sna.2013.01.053).

Record type: Article

Abstract

Embedding a micro-machined sensing element in a closed loop, force feedback system is a technique commonly used to realise high performance MEMS (micro-electro-mechanical systems) sensors due to the advantages of better linearity, increased dynamic range and reduced parameter sensitivity. Electro-mechanical Sigma Delta modulators (EMΣΔ) have been proposed for this reason and high order loops have been shown to enjoy a good signal to noise ratio (SNR) of more than 100dB. It is also well known that achieving stability in high order EMΣΔs is a challenging task and in practice stability can be lost with large input signals or due to non-ideal effects in the circuits implemented. In this work we propose a novel dfferential frequency domain technique for closed loop control of micro-machined sensors. This method, called the electro-mechanical phase locked loop (EMPLL), uses a differential electro-mechanical phase locked loop to control and measure the detection of micro-machined sensors. We believe that EMPLLs have the potential to have significant advantages over EMΣΔs for high performance MEMS sensors. Preliminary research suggests that this novel approach will lead to significant benefits in Signal to Noise Ratio, Parameter Sensitivity, and Input Signal Range.

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Accepted/In Press date: 30 January 2013
Published date: 19 February 2013
Organisations: EEE

Identifiers

Local EPrints ID: 348720
URI: http://eprints.soton.ac.uk/id/eprint/348720
ISSN: 0924-4247
PURE UUID: fb2d81a8-999c-42aa-b4ed-54593ebfa45b
ORCID for Nick Harris: ORCID iD orcid.org/0000-0003-4122-2219

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Date deposited: 18 Feb 2013 15:54
Last modified: 15 Mar 2024 02:46

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Contributors

Author: Peter R. Wilson
Author: Robert Rudolf
Author: Ke Li
Author: Reuben Wilcock
Author: Andrew D. Brown
Author: Nick Harris ORCID iD

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