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Single-mode rib waveguides in (Yb,Nb) : RbTiOPO4 by reactive ion etching

Single-mode rib waveguides in (Yb,Nb) : RbTiOPO4 by reactive ion etching
Single-mode rib waveguides in (Yb,Nb) : RbTiOPO4 by reactive ion etching
We present the fabrication of single-mode rib waveguides in (Yb,Nb):RbTiOPO4 ((Yb,Nb):RTP) by reactive ion etching (RIE) with a combination of SF6 and Ar gases. The influence of the gas pressure, RF power and gas ratio on the etch rate and surface quality was studied to optimize the etching of RTP. Optimized parameters were used to fabricate rib waveguides in a (Yb,Nb):RTP film, grown by liquid phase epitaxy, with an etch rate of 10 nm/min. Channel waveguide propagation was demonstrated for the first time in an RIE etched (Yb,Nb):RTP rib structure.
0022-3727
Choudhary, Amol
a5540b54-f153-43e4-a59a-e3ed9360904b
Cugat, J.
1ae031ce-1563-404b-822f-c4ae2ebd6835
Pradeesh, Kannan
d264c1f5-cbaf-42ac-a939-10fce00fa5cb
Solé, R.
1a1a97ea-3cba-4fa4-b476-1bbbe7ebd9a9
Díaz, F.
babe7378-e970-4195-beab-84f41b1694a4
Aguiló, M.
61fe554a-22ea-43db-9fd3-8d3209bf99ed
Chong, H.M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Shepherd, D.P.
9fdd51c4-39d6-41b3-9021-4c033c2f4ead
Choudhary, Amol
a5540b54-f153-43e4-a59a-e3ed9360904b
Cugat, J.
1ae031ce-1563-404b-822f-c4ae2ebd6835
Pradeesh, Kannan
d264c1f5-cbaf-42ac-a939-10fce00fa5cb
Solé, R.
1a1a97ea-3cba-4fa4-b476-1bbbe7ebd9a9
Díaz, F.
babe7378-e970-4195-beab-84f41b1694a4
Aguiló, M.
61fe554a-22ea-43db-9fd3-8d3209bf99ed
Chong, H.M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Shepherd, D.P.
9fdd51c4-39d6-41b3-9021-4c033c2f4ead

Choudhary, Amol, Cugat, J., Pradeesh, Kannan, Solé, R., Díaz, F., Aguiló, M., Chong, H.M.H. and Shepherd, D.P. (2013) Single-mode rib waveguides in (Yb,Nb) : RbTiOPO4 by reactive ion etching. Journal of Physics D: Applied Physics, 46 (14). (doi:10.1088/0022-3727/46/14/145108).

Record type: Article

Abstract

We present the fabrication of single-mode rib waveguides in (Yb,Nb):RbTiOPO4 ((Yb,Nb):RTP) by reactive ion etching (RIE) with a combination of SF6 and Ar gases. The influence of the gas pressure, RF power and gas ratio on the etch rate and surface quality was studied to optimize the etching of RTP. Optimized parameters were used to fabricate rib waveguides in a (Yb,Nb):RTP film, grown by liquid phase epitaxy, with an etch rate of 10 nm/min. Channel waveguide propagation was demonstrated for the first time in an RIE etched (Yb,Nb):RTP rib structure.

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More information

Published date: 2013
Organisations: Optoelectronics Research Centre, Electronics & Computer Science

Identifiers

Local EPrints ID: 350148
URI: https://eprints.soton.ac.uk/id/eprint/350148
ISSN: 0022-3727
PURE UUID: 9609f7fe-fdff-4c06-8fd8-2f71d97924c5
ORCID for H.M.H. Chong: ORCID iD orcid.org/0000-0002-7110-5761
ORCID for D.P. Shepherd: ORCID iD orcid.org/0000-0002-4561-8184

Catalogue record

Date deposited: 19 Mar 2013 10:17
Last modified: 20 Jul 2019 01:25

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Contributors

Author: Amol Choudhary
Author: J. Cugat
Author: Kannan Pradeesh
Author: R. Solé
Author: F. Díaz
Author: M. Aguiló
Author: H.M.H. Chong ORCID iD
Author: D.P. Shepherd ORCID iD

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