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Oxygen plasma induced hydrophilicity of parylene-C thin films

Oxygen plasma induced hydrophilicity of parylene-C thin films
Oxygen plasma induced hydrophilicity of parylene-C thin films
This paper investigates the surface modification of Parylene-C thin films under various oxygen plasma treatment conditions, such as power intensity (50:400 W) and exposure time (1:20 min). The extent of hydrophilicity was investigated through contact angle measurements, and correlations between treatment parameters, film thickness, restoration of hydrophobicity and etching rates were experimentally established. We also demonstrate the selective modification of Parylene-C films, facilitating distinct hydrophilic and hydrophobic areas with µm-resolution that can be exploited in self-alignment applications.
0169-4332
43-51
Trantidou, Tatiana
d5672813-459c-47da-9de0-843449d3ce25
Prodromakis, Themistoklis
d58c9c10-9d25-4d22-b155-06c8437acfbf
Toumazou, Chris
1541f8dd-53b0-41a3-8fbd-5351c3919194
Trantidou, Tatiana
d5672813-459c-47da-9de0-843449d3ce25
Prodromakis, Themistoklis
d58c9c10-9d25-4d22-b155-06c8437acfbf
Toumazou, Chris
1541f8dd-53b0-41a3-8fbd-5351c3919194

Trantidou, Tatiana, Prodromakis, Themistoklis and Toumazou, Chris (2012) Oxygen plasma induced hydrophilicity of parylene-C thin films. Applied Surface Science, 261, 43-51. (doi:10.1016/j.apsusc.2012.06.112).

Record type: Article

Abstract

This paper investigates the surface modification of Parylene-C thin films under various oxygen plasma treatment conditions, such as power intensity (50:400 W) and exposure time (1:20 min). The extent of hydrophilicity was investigated through contact angle measurements, and correlations between treatment parameters, film thickness, restoration of hydrophobicity and etching rates were experimentally established. We also demonstrate the selective modification of Parylene-C films, facilitating distinct hydrophilic and hydrophobic areas with µm-resolution that can be exploited in self-alignment applications.

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More information

Published date: 15 November 2012
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 351542
URI: https://eprints.soton.ac.uk/id/eprint/351542
ISSN: 0169-4332
PURE UUID: f573cead-e7ee-42a1-b0bf-420106950ad3
ORCID for Themistoklis Prodromakis: ORCID iD orcid.org/0000-0002-6267-6909

Catalogue record

Date deposited: 24 Apr 2013 11:05
Last modified: 07 Jul 2018 00:29

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