Biocompatible encapsulation of CMOS based chemical sensors
Biocompatible encapsulation of CMOS based chemical sensors
One of the most challenging design aspects of chemical sensors is the isolation of the non-sensitive areas from the sensed medium. This becomes particularly critical in applications where the sensors are part of an implantable platform, restricting the available options to those using biocompatible materials. Parylene has been extensively used to coat pacemakers as it demonstrates excellent chemical, electrical and thermal stability. In this work, we have utilized parylene to encapsulate CMOS-based chemical sensors bonded on a cartridge, while the sensing area has been exposed by laser ablation and sonication. Measured results demonstrate improved electrical isolation than previously reported techniques.
791-794
Prodromakis, T.
d58c9c10-9d25-4d22-b155-06c8437acfbf
Michelakis, K.
ea581b11-2706-421d-88a2-f710075c9e25
Zoumpoulidis, T.
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Dekker, R.
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Toumazou, C.
52728165-8fe5-4c54-9fad-e9ccc4423dd6
26 October 2009
Prodromakis, T.
d58c9c10-9d25-4d22-b155-06c8437acfbf
Michelakis, K.
ea581b11-2706-421d-88a2-f710075c9e25
Zoumpoulidis, T.
a6c6038a-f2a0-480d-aac3-357893b69e03
Dekker, R.
09093f36-e0eb-4c9f-ac83-227da461e437
Toumazou, C.
52728165-8fe5-4c54-9fad-e9ccc4423dd6
Prodromakis, T., Michelakis, K., Zoumpoulidis, T., Dekker, R. and Toumazou, C.
(2009)
Biocompatible encapsulation of CMOS based chemical sensors.
2009 IEEE Sensors, Christchurch, New Zealand.
25 - 28 Oct 2009.
.
(doi:10.1109/ICSENS.2009.5398537).
Record type:
Conference or Workshop Item
(Other)
Abstract
One of the most challenging design aspects of chemical sensors is the isolation of the non-sensitive areas from the sensed medium. This becomes particularly critical in applications where the sensors are part of an implantable platform, restricting the available options to those using biocompatible materials. Parylene has been extensively used to coat pacemakers as it demonstrates excellent chemical, electrical and thermal stability. In this work, we have utilized parylene to encapsulate CMOS-based chemical sensors bonded on a cartridge, while the sensing area has been exposed by laser ablation and sonication. Measured results demonstrate improved electrical isolation than previously reported techniques.
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More information
Published date: 26 October 2009
Venue - Dates:
2009 IEEE Sensors, Christchurch, New Zealand, 2009-10-25 - 2009-10-28
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 351554
URI: http://eprints.soton.ac.uk/id/eprint/351554
PURE UUID: adf6f35e-beac-4519-b0ad-f06beed058d2
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Date deposited: 29 Apr 2013 08:29
Last modified: 14 Mar 2024 13:41
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Contributors
Author:
T. Prodromakis
Author:
K. Michelakis
Author:
T. Zoumpoulidis
Author:
R. Dekker
Author:
C. Toumazou
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