Batch encapsulation technique for CMOS based chemical sensors
Batch encapsulation technique for CMOS based chemical sensors
This paper presents a batch encapsulation technique for CMOS based chemical sensors. SU-8 photoresist is employed as the encapsulant while the sensing membrane of the sensor is directly exposed to the solution. This approach is based on standard photolithographic techniques and thus can be used for processing multiple dies containing chemical sensors in a single step.
cmos, su-8 photoresist, chemical sensor, encapsulation
321-324
Prodromakis, T.
d58c9c10-9d25-4d22-b155-06c8437acfbf
Georgiou, P.
3caf7479-7f5a-46ec-8e3c-ef04d0528caf
Constandinou, T.G.
949507c0-75c7-4307-8d5f-8dcce8d7bfc3
Michelakis, K.
ea581b11-2706-421d-88a2-f710075c9e25
Toumazou, C.
52728165-8fe5-4c54-9fad-e9ccc4423dd6
22 November 2008
Prodromakis, T.
d58c9c10-9d25-4d22-b155-06c8437acfbf
Georgiou, P.
3caf7479-7f5a-46ec-8e3c-ef04d0528caf
Constandinou, T.G.
949507c0-75c7-4307-8d5f-8dcce8d7bfc3
Michelakis, K.
ea581b11-2706-421d-88a2-f710075c9e25
Toumazou, C.
52728165-8fe5-4c54-9fad-e9ccc4423dd6
Prodromakis, T., Georgiou, P., Constandinou, T.G., Michelakis, K. and Toumazou, C.
(2008)
Batch encapsulation technique for CMOS based chemical sensors.
2008 IEEE Biomedical Circuits and Systems Conference, Baltimore, United States.
20 - 22 Nov 2008.
.
(doi:10.1109/BIOCAS.2008.4696939).
Record type:
Conference or Workshop Item
(Other)
Abstract
This paper presents a batch encapsulation technique for CMOS based chemical sensors. SU-8 photoresist is employed as the encapsulant while the sensing membrane of the sensor is directly exposed to the solution. This approach is based on standard photolithographic techniques and thus can be used for processing multiple dies containing chemical sensors in a single step.
This record has no associated files available for download.
More information
Published date: 22 November 2008
Venue - Dates:
2008 IEEE Biomedical Circuits and Systems Conference, Baltimore, United States, 2008-11-20 - 2008-11-22
Keywords:
cmos, su-8 photoresist, chemical sensor, encapsulation
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 351561
URI: http://eprints.soton.ac.uk/id/eprint/351561
PURE UUID: 91405c8f-86fd-4831-b3c4-05b2ec5ad742
Catalogue record
Date deposited: 29 Apr 2013 09:14
Last modified: 14 Mar 2024 13:41
Export record
Altmetrics
Contributors
Author:
T. Prodromakis
Author:
P. Georgiou
Author:
T.G. Constandinou
Author:
K. Michelakis
Author:
C. Toumazou
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics