The University of Southampton
University of Southampton Institutional Repository

Batch encapsulation technique for CMOS based chemical sensors

Batch encapsulation technique for CMOS based chemical sensors
Batch encapsulation technique for CMOS based chemical sensors
This paper presents a batch encapsulation technique for CMOS based chemical sensors. SU-8 photoresist is employed as the encapsulant while the sensing membrane of the sensor is directly exposed to the solution. This approach is based on standard photolithographic techniques and thus can be used for processing multiple dies containing chemical sensors in a single step.
cmos, su-8 photoresist, chemical sensor, encapsulation
321-324
Prodromakis, T.
d58c9c10-9d25-4d22-b155-06c8437acfbf
Georgiou, P.
3caf7479-7f5a-46ec-8e3c-ef04d0528caf
Constandinou, T.G.
949507c0-75c7-4307-8d5f-8dcce8d7bfc3
Michelakis, K.
ea581b11-2706-421d-88a2-f710075c9e25
Toumazou, C.
52728165-8fe5-4c54-9fad-e9ccc4423dd6
Prodromakis, T.
d58c9c10-9d25-4d22-b155-06c8437acfbf
Georgiou, P.
3caf7479-7f5a-46ec-8e3c-ef04d0528caf
Constandinou, T.G.
949507c0-75c7-4307-8d5f-8dcce8d7bfc3
Michelakis, K.
ea581b11-2706-421d-88a2-f710075c9e25
Toumazou, C.
52728165-8fe5-4c54-9fad-e9ccc4423dd6

Prodromakis, T., Georgiou, P., Constandinou, T.G., Michelakis, K. and Toumazou, C. (2008) Batch encapsulation technique for CMOS based chemical sensors. 2008 IEEE Biomedical Circuits and Systems Conference, Baltimore, United States. 20 - 22 Nov 2008. pp. 321-324 . (doi:10.1109/BIOCAS.2008.4696939).

Record type: Conference or Workshop Item (Other)

Abstract

This paper presents a batch encapsulation technique for CMOS based chemical sensors. SU-8 photoresist is employed as the encapsulant while the sensing membrane of the sensor is directly exposed to the solution. This approach is based on standard photolithographic techniques and thus can be used for processing multiple dies containing chemical sensors in a single step.

This record has no associated files available for download.

More information

Published date: 22 November 2008
Venue - Dates: 2008 IEEE Biomedical Circuits and Systems Conference, Baltimore, United States, 2008-11-20 - 2008-11-22
Keywords: cmos, su-8 photoresist, chemical sensor, encapsulation
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 351561
URI: http://eprints.soton.ac.uk/id/eprint/351561
PURE UUID: 91405c8f-86fd-4831-b3c4-05b2ec5ad742
ORCID for T. Prodromakis: ORCID iD orcid.org/0000-0002-6267-6909

Catalogue record

Date deposited: 29 Apr 2013 09:14
Last modified: 14 Mar 2024 13:41

Export record

Altmetrics

Contributors

Author: T. Prodromakis ORCID iD
Author: P. Georgiou
Author: T.G. Constandinou
Author: K. Michelakis
Author: C. Toumazou

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×