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Low temperature hot-wire polysilicon waveguides

Low temperature hot-wire polysilicon waveguides
Low temperature hot-wire polysilicon waveguides
We fabricated and measured low loss polysilicon waveguides deposited using Hot-Wire Chemical Vapor Deposition (HWCVD) at 240 °C. The optical propagation loss was measured to be 11.9 dB/cm at lambda = 1550 nm.
Ben Masaud, Taha M.
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Tarazona, A.
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Ben Masaud, Taha M.
4b4264c4-210b-4d14-9e2c-3fb8ccbc5b6b
Tarazona, A.
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1

Ben Masaud, Taha M., Tarazona, A., Chen, Xia, Reed, Graham T. and Chong, Harold M.H. (2013) Low temperature hot-wire polysilicon waveguides. Conference on Lasers and Electro-Optics Pacific Rim, Japan. 30 Jun - 04 Jul 2013.

Record type: Conference or Workshop Item (Paper)

Abstract

We fabricated and measured low loss polysilicon waveguides deposited using Hot-Wire Chemical Vapor Deposition (HWCVD) at 240 °C. The optical propagation loss was measured to be 11.9 dB/cm at lambda = 1550 nm.

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More information

e-pub ahead of print date: 30 June 2013
Venue - Dates: Conference on Lasers and Electro-Optics Pacific Rim, Japan, 2013-06-30 - 2013-07-04
Organisations: Optoelectronics Research Centre, Mathematical Sciences, Nanoelectronics and Nanotechnology, Civil Maritime & Env. Eng & Sci Unit

Identifiers

Local EPrints ID: 351683
URI: https://eprints.soton.ac.uk/id/eprint/351683
PURE UUID: bb2e8882-3328-478c-aa36-ccfd11960c0a
ORCID for Xia Chen: ORCID iD orcid.org/0000-0002-0994-5401
ORCID for Harold M.H. Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 25 Apr 2013 10:11
Last modified: 06 Jun 2018 12:37

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