Novel metal gates for high ? applications

Chang, Mei, Chen, Michael S., David, Anaïs, Gandikota, Srinivas, Ganguli, Seshadri, Hayden, Brian E., Hung, Steven, Lu, Xinliang, Mormiche, Claire, Noori, Atif, Smith, Duncan C.A. and Vian, Chris J.B. (2013) Novel metal gates for high ? applications. Journal of Applied Physics, 113 (3), 34107. (doi:10.1063/1.4780447).

Abstract

The development of gate systems suitable for high ? dielectrics is critical to the advancement of complementary metal-oxide-semiconductor (CMOS) devices. Both the effective work function and material stability are key parameters to these systems. A systematic study of metal gates of the composition HfxSi1-x (0.25 ? x ? 1) is demonstrated here, including XPS, XRD and four point probe measurements. The effective work function of each material is evaluated and it is shown that it can be tuned from 4.5 to less than 4.0?eV. Suitable work functions for n-channel metal-oxide-semiconductor applications (4.05?±?0.2?eV) were achieved using hafnium rich compositions; however, XPS and diffraction measurements confirmed that these materials demonstrated a high propensity to oxidise, causing the reduction of the underlying oxides, making them unsuitable for commercial application.

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Contributors

Author: Brian E. Hayden

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