A novel fabrication process to release a valveless micropump on a flexible substrate
A novel fabrication process to release a valveless micropump on a flexible substrate
This paper reports, for the first time, the design, fabrication and testing of a valveless micropump, entirely screen printed onto a flexible polyimide (Kapton) substrate by using sacrificial, polymer-structural and piezoelectric layers. The sacrificial layer, used to achieve a pump chamber and inlet/outlet channels, is thermally removed, analogous to a standard MEMS sacrificial process. Applying a sinusoidal AC voltage to the piezoelectric layer drives a flexible membrane which pumps liquid through the chamber. A maximum flow rate of 67µL/min can be achieved using a drive frequency of 600 kHz.
screen printing, sacrificial technology, smart fabrics, micropump
Wei, Yang
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Torah, R.N.
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Yang, Kai
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Beeby, S.P.
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Tudor, John
46eea408-2246-4aa0-8b44-86169ed601ff
June 2013
Wei, Yang
c6d13914-4f35-459c-8c25-8f8b77b7c5b3
Torah, R.N.
7147b47b-db01-4124-95dc-90d6a9842688
Yang, Kai
f1c9b81d-e821-47eb-a69e-b3bc419de9c7
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, John
46eea408-2246-4aa0-8b44-86169ed601ff
Wei, Yang, Torah, R.N., Yang, Kai, Beeby, S.P. and Tudor, John
(2013)
A novel fabrication process to release a valveless micropump on a flexible substrate.
The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '2013), Barcelona, Spain.
16 - 20 Jun 2013.
4 pp
.
Record type:
Conference or Workshop Item
(Paper)
Abstract
This paper reports, for the first time, the design, fabrication and testing of a valveless micropump, entirely screen printed onto a flexible polyimide (Kapton) substrate by using sacrificial, polymer-structural and piezoelectric layers. The sacrificial layer, used to achieve a pump chamber and inlet/outlet channels, is thermally removed, analogous to a standard MEMS sacrificial process. Applying a sinusoidal AC voltage to the piezoelectric layer drives a flexible membrane which pumps liquid through the chamber. A maximum flow rate of 67µL/min can be achieved using a drive frequency of 600 kHz.
Text
PID2718573.pdf
- Author's Original
More information
Published date: June 2013
Venue - Dates:
The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '2013), Barcelona, Spain, 2013-06-16 - 2013-06-20
Keywords:
screen printing, sacrificial technology, smart fabrics, micropump
Organisations:
EEE
Identifiers
Local EPrints ID: 353854
URI: http://eprints.soton.ac.uk/id/eprint/353854
PURE UUID: c8104a63-f75f-4a58-893f-8628d677507a
Catalogue record
Date deposited: 21 Jun 2013 13:53
Last modified: 15 Mar 2024 03:37
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Contributors
Author:
Yang Wei
Author:
R.N. Torah
Author:
S.P. Beeby
Author:
John Tudor
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