Wei, Yang, Torah, R.N., Yang, Kai, Beeby, S.P. and Tudor, John
A novel fabrication process to release a valveless micropump on a flexible substrate
At The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '2013), Spain.
16 - 20 Jun 2013.
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This paper reports, for the first time, the design, fabrication and testing of a valveless micropump, entirely screen printed onto a flexible polyimide (Kapton) substrate by using sacrificial, polymer-structural and piezoelectric layers. The sacrificial layer, used to achieve a pump chamber and inlet/outlet channels, is thermally removed, analogous to a standard MEMS sacrificial process. Applying a sinusoidal AC voltage to the piezoelectric layer drives a flexible membrane which pumps liquid through the chamber. A maximum flow rate of 67µL/min can be achieved using a drive frequency of 600 kHz.
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A novel fabrication process to release a valveless micropump on a flexible substrate (deposited 21 Jun 2013 13:53)
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