A novel fabrication process to release a valveless micropump on a flexible substrate


Wei, Yang, Torah, R.N., Yang, Kai, Beeby, S.P. and Tudor, John (2013) A novel fabrication process to release a valveless micropump on a flexible substrate At The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '2013), Spain. 16 - 20 Jun 2013. 4 pp.

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Description/Abstract

This paper reports, for the first time, the design, fabrication and testing of a valveless micropump, entirely screen printed onto a flexible polyimide (Kapton) substrate by using sacrificial, polymer-structural and piezoelectric layers. The sacrificial layer, used to achieve a pump chamber and inlet/outlet channels, is thermally removed, analogous to a standard MEMS sacrificial process. Applying a sinusoidal AC voltage to the piezoelectric layer drives a flexible membrane which pumps liquid through the chamber. A maximum flow rate of 67µL/min can be achieved using a drive frequency of 600 kHz.

Item Type: Conference or Workshop Item (Paper)
Venue - Dates: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '2013), Spain, 2013-06-16 - 2013-06-20
Related URLs:
Keywords: screen printing, sacrificial technology, smart fabrics, micropump
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Organisations: EEE
ePrint ID: 353854
Date :
Date Event
June 2013Published
Date Deposited: 21 Jun 2013 13:53
Last Modified: 17 Apr 2017 15:21
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/353854

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  • A novel fabrication process to release a valveless micropump on a flexible substrate (deposited 21 Jun 2013 13:53) [Currently Displayed]

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