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A novel fabrication process to release a valveless micropump on a flexible substrate

Record type: Conference or Workshop Item (Paper)

This paper reports, for the first time, the design, fabrication and testing of a valveless micropump, entirely screen printed onto a flexible polyimide (Kapton) substrate by using sacrificial, polymer-structural and piezoelectric layers. The sacrificial layer, used to achieve a pump chamber and inlet/outlet channels, is thermally removed, analogous to a standard MEMS sacrificial process. Applying a sinusoidal AC voltage to the piezoelectric layer drives a flexible membrane which pumps liquid through the chamber. A maximum flow rate of 67µL/min can be achieved using a drive frequency of 600 kHz.

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Citation

Wei, Yang, Torah, R.N., Yang, Kai, Beeby, S.P. and Tudor, John (2013) A novel fabrication process to release a valveless micropump on a flexible substrate At The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '2013), Spain. 16 - 20 Jun 2013. 4 pp.

More information

Published date: June 2013
Venue - Dates: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '2013), Spain, 2013-06-16 - 2013-06-20
Keywords: screen printing, sacrificial technology, smart fabrics, micropump
Organisations: EEE

Identifiers

Local EPrints ID: 353854
URI: http://eprints.soton.ac.uk/id/eprint/353854
PURE UUID: c8104a63-f75f-4a58-893f-8628d677507a
ORCID for Yang Wei: ORCID iD orcid.org/0000-0001-6195-8595
ORCID for S.P. Beeby: ORCID iD orcid.org/0000-0002-0800-1759

Catalogue record

Date deposited: 21 Jun 2013 13:53
Last modified: 18 Jul 2017 04:00

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Contributors

Author: Yang Wei ORCID iD
Author: R.N. Torah
Author: Kai Yang
Author: S.P. Beeby ORCID iD
Author: John Tudor

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