Free-standing parylene C thin films as flexible pH sensing membranes
Free-standing parylene C thin films as flexible pH sensing membranes
Parylene C has been extensively used as a biocompatible encapsulation material of implantable microdevices. Towards a new understanding of the material’s potential, we demonstrate a versatile method that enables the deployment of the material both as an encapsulant and as a H+ sensing membrane in a single flexible platform using discrete MOSFETs to evaluate its chemical sensing performance. A 40-electrode array was implemented through standard microfabrication techniques on a free-standing 5 µm film of Parylene. A thin film (1µm) of Parylene was finally deposited on top of the array to encapsulate the electrode tracks. O2 plasma treatment was employed to selectively functionalize Parylene’s H+ sensing capacity. Our investigation reveals that the fabricated sensor yields a reliable pH sensing device, which exhibits distinguishable sensitivity, low leakage currents and drift rates over a wide pH range (4-10), rendering Parylene a promising material in the field of flexible electronics.
parylene C, chemical sensing membrane, pH monitoring, flexible sensor, extended gate
Trantidou, T.
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Tariq, M
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Chang, Y.-C.
198885da-6329-464c-84b9-85275a968da1
Toumazou, C.
52728165-8fe5-4c54-9fad-e9ccc4423dd6
Prodromakis, T.
d58c9c10-9d25-4d22-b155-06c8437acfbf
6 November 2013
Trantidou, T.
1a2705ad-366d-432b-be5f-523d1303930c
Tariq, M
9fce5bf7-14aa-4a03-817d-a3164a15f2fc
Chang, Y.-C.
198885da-6329-464c-84b9-85275a968da1
Toumazou, C.
52728165-8fe5-4c54-9fad-e9ccc4423dd6
Prodromakis, T.
d58c9c10-9d25-4d22-b155-06c8437acfbf
Trantidou, T., Tariq, M, Chang, Y.-C., Toumazou, C. and Prodromakis, T.
(2013)
Free-standing parylene C thin films as flexible pH sensing membranes.
IEEE Sensors 2013, Baltimore, City of, United States.
03 - 06 Nov 2013.
Record type:
Conference or Workshop Item
(Other)
Abstract
Parylene C has been extensively used as a biocompatible encapsulation material of implantable microdevices. Towards a new understanding of the material’s potential, we demonstrate a versatile method that enables the deployment of the material both as an encapsulant and as a H+ sensing membrane in a single flexible platform using discrete MOSFETs to evaluate its chemical sensing performance. A 40-electrode array was implemented through standard microfabrication techniques on a free-standing 5 µm film of Parylene. A thin film (1µm) of Parylene was finally deposited on top of the array to encapsulate the electrode tracks. O2 plasma treatment was employed to selectively functionalize Parylene’s H+ sensing capacity. Our investigation reveals that the fabricated sensor yields a reliable pH sensing device, which exhibits distinguishable sensitivity, low leakage currents and drift rates over a wide pH range (4-10), rendering Parylene a promising material in the field of flexible electronics.
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More information
Published date: 6 November 2013
Venue - Dates:
IEEE Sensors 2013, Baltimore, City of, United States, 2013-11-03 - 2013-11-06
Keywords:
parylene C, chemical sensing membrane, pH monitoring, flexible sensor, extended gate
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 354153
URI: http://eprints.soton.ac.uk/id/eprint/354153
PURE UUID: 66170144-c6a1-4ce3-8dcf-ae9f446f7db1
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Date deposited: 10 Jul 2013 14:18
Last modified: 09 Jan 2022 03:44
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Contributors
Author:
T. Trantidou
Author:
M Tariq
Author:
Y.-C. Chang
Author:
C. Toumazou
Author:
T. Prodromakis
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