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Fabrication of tapered edgewall apertures using grayscale lithography

Fabrication of tapered edgewall apertures using grayscale lithography
Fabrication of tapered edgewall apertures using grayscale lithography
Kiang, Kian Shen
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Kalsi, Sumit
65cb3d4c-c28c-490a-85a3-7a8fb96ecfee
Ritter, Daniel
7671dda3-d760-49ba-8564-1f4bebab2abf
Unal, Nezih
532cd0db-9d48-4b2c-b1f9-27c60b77ff8d
Morgan, Hywel
de00d59f-a5a2-48c4-a99a-1d5dd7854174
Anteney, Iain
a6ff36e1-8941-4911-9bf0-f005fd8ea2aa
Chong, Harold M. H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
de Planque, Maurits R.R.
a1d33d13-f516-44fb-8d2c-c51d18bc21ba
Kiang, Kian Shen
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Kalsi, Sumit
65cb3d4c-c28c-490a-85a3-7a8fb96ecfee
Ritter, Daniel
7671dda3-d760-49ba-8564-1f4bebab2abf
Unal, Nezih
532cd0db-9d48-4b2c-b1f9-27c60b77ff8d
Morgan, Hywel
de00d59f-a5a2-48c4-a99a-1d5dd7854174
Anteney, Iain
a6ff36e1-8941-4911-9bf0-f005fd8ea2aa
Chong, Harold M. H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
de Planque, Maurits R.R.
a1d33d13-f516-44fb-8d2c-c51d18bc21ba

Kiang, Kian Shen, Kalsi, Sumit, Ritter, Daniel, Unal, Nezih, Morgan, Hywel, Anteney, Iain, Chong, Harold M. H. and de Planque, Maurits R.R. (2013) Fabrication of tapered edgewall apertures using grayscale lithography. 39th International Conference on Micro and Nano Engineering, United Kingdom. 16 - 19 Sep 2013.

Record type: Conference or Workshop Item (Poster)

Full text not available from this repository.

More information

e-pub ahead of print date: 18 September 2013
Venue - Dates: 39th International Conference on Micro and Nano Engineering, United Kingdom, 2013-09-16 - 2013-09-19
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 354186
URI: https://eprints.soton.ac.uk/id/eprint/354186
PURE UUID: 242e38f9-a3cf-44b9-950d-38b822c6d0e4
ORCID for Kian Shen Kiang: ORCID iD orcid.org/0000-0002-7326-909X
ORCID for Hywel Morgan: ORCID iD orcid.org/0000-0003-4850-5676
ORCID for Harold M. H. Chong: ORCID iD orcid.org/0000-0002-7110-5761
ORCID for Maurits R.R. de Planque: ORCID iD orcid.org/0000-0002-8787-0513

Catalogue record

Date deposited: 10 Jul 2013 15:11
Last modified: 06 Jun 2018 12:45

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Contributors

Author: Kian Shen Kiang ORCID iD
Author: Sumit Kalsi
Author: Daniel Ritter
Author: Nezih Unal
Author: Hywel Morgan ORCID iD
Author: Iain Anteney

University divisions

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