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Highly linear and large spring deflection characteristics of a Quasi-Concertina MEMS device

Highly linear and large spring deflection characteristics of a Quasi-Concertina MEMS device
Highly linear and large spring deflection characteristics of a Quasi-Concertina MEMS device
Grech, David
8366bdb6-7c29-4537-a41e-7a19370f70aa
KIANG, Kian Shen
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Zekonyte, Jurgita
c40df725-5ce3-4692-b638-bbb4d847b5ea
Stolz, Martin
7bfa1d59-511d-471b-96ce-679b343b5d1d
Woods, Robert
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Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Grech, David
8366bdb6-7c29-4537-a41e-7a19370f70aa
KIANG, Kian Shen
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Zekonyte, Jurgita
c40df725-5ce3-4692-b638-bbb4d847b5ea
Stolz, Martin
7bfa1d59-511d-471b-96ce-679b343b5d1d
Woods, Robert
8494e1ec-dcbd-4c60-b556-6e0d79b7a0fa
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1

Grech, David, KIANG, Kian Shen, Zekonyte, Jurgita, Stolz, Martin, Woods, Robert and Chong, Harold M.H. (2013) Highly linear and large spring deflection characteristics of a Quasi-Concertina MEMS device. 39th International Conference on Micro and Nano Engineering, , London, United Kingdom. 16 - 19 Sep 2013.

Record type: Conference or Workshop Item (Paper)

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More information

Published date: 16 September 2013
Venue - Dates: 39th International Conference on Micro and Nano Engineering, , London, United Kingdom, 2013-09-16 - 2013-09-19
Related URLs:
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 355280
URI: http://eprints.soton.ac.uk/id/eprint/355280
PURE UUID: a4c2f3fe-52b4-49da-94dc-3abfc2004e9d
ORCID for Kian Shen KIANG: ORCID iD orcid.org/0000-0002-7326-909X
ORCID for Martin Stolz: ORCID iD orcid.org/0000-0002-0732-0811
ORCID for Harold M.H. Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 21 Aug 2013 12:07
Last modified: 11 Dec 2021 04:25

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Contributors

Author: David Grech
Author: Kian Shen KIANG ORCID iD
Author: Jurgita Zekonyte
Author: Martin Stolz ORCID iD
Author: Robert Woods
Author: Harold M.H. Chong ORCID iD

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