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Dielectric waveguide vertically coupled to all-silicon photodiodes operating at telecommunication wavelengths

Dielectric waveguide vertically coupled to all-silicon photodiodes operating at telecommunication wavelengths
Dielectric waveguide vertically coupled to all-silicon photodiodes operating at telecommunication wavelengths
We present a method for detecting light in the 1550nm wavelength window based on a silicon nitride waveguide that is vertically coupled to a silicon photonic crystal cavity. The absorption in silicon arises from deep-levels created by ion implantation, thereby providing excellent CMOS compatibility. We demonstrate a responsivity of 0.108 A/W at -10V reverse bias with a dark current of 9.4nA. Our work demonstrates one of the smallest wavelength selective photodectors realised to date. By cascading such detectors we also demonstrate a two-channel demultiplexer.
CMOS integrated circuits, deep levels, dielectric waveguides, integrated optoelectronics, ion implantation, light absorption, optical waveguides, photodetectors, photodiodes, photonic crystals, silicon compounds
0003-6951
171106
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Gardes, Frederic Y.
7a49fc6d-dade-4099-b016-c60737cb5bb2
Knights, Andrew P.
5a042eab-1929-49f2-a243-897d3aad063b
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Krauss, Thomas F.
eb9a979b-8e52-4b83-b92b-7a0fbbc1ca58
O'Faolain, Liam
b9696b63-9c51-4745-83c5-131d48e782e8
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Gardes, Frederic Y.
7a49fc6d-dade-4099-b016-c60737cb5bb2
Knights, Andrew P.
5a042eab-1929-49f2-a243-897d3aad063b
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Krauss, Thomas F.
eb9a979b-8e52-4b83-b92b-7a0fbbc1ca58
O'Faolain, Liam
b9696b63-9c51-4745-83c5-131d48e782e8

Debnath, Kapil, Gardes, Frederic Y., Knights, Andrew P., Reed, Graham T., Krauss, Thomas F. and O'Faolain, Liam (2013) Dielectric waveguide vertically coupled to all-silicon photodiodes operating at telecommunication wavelengths. Applied Physics Letters, 102 (17), 171106. (doi:10.1063/1.4803541).

Record type: Article

Abstract

We present a method for detecting light in the 1550nm wavelength window based on a silicon nitride waveguide that is vertically coupled to a silicon photonic crystal cavity. The absorption in silicon arises from deep-levels created by ion implantation, thereby providing excellent CMOS compatibility. We demonstrate a responsivity of 0.108 A/W at -10V reverse bias with a dark current of 9.4nA. Our work demonstrates one of the smallest wavelength selective photodectors realised to date. By cascading such detectors we also demonstrate a two-channel demultiplexer.

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More information

Published date: 30 April 2013
Keywords: CMOS integrated circuits, deep levels, dielectric waveguides, integrated optoelectronics, ion implantation, light absorption, optical waveguides, photodetectors, photodiodes, photonic crystals, silicon compounds
Organisations: Optoelectronics Research Centre, Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 355721
URI: https://eprints.soton.ac.uk/id/eprint/355721
ISSN: 0003-6951
PURE UUID: fc4d20c5-64a5-418f-9331-85e0b2ab34dc

Catalogue record

Date deposited: 04 Sep 2013 09:55
Last modified: 09 Jul 2019 16:30

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Contributors

Author: Kapil Debnath
Author: Andrew P. Knights
Author: Graham T. Reed
Author: Thomas F. Krauss
Author: Liam O'Faolain

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