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A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators

A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators
A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators
A micromachined reconfigurable metamaterial is presented, whose unit cell consists of a pair of asymmetric split-ring resonators (ASRRs); one is fixed to the substrate while the other is patterned on a movable frame. The reconfigurable metamaterial and the supporting structures (e.g., microactuators, anchors, supporting frames, etc.) are fabricated on a silicon-on-insulator wafer using deep reactive-ion etching (DRIE). By adjusting the distance between the two ASRRs, the strength of dipole–dipole coupling can be tuned continuously using the micromachined actuators and this enables tailoring of the electromagnetic response. The reconfiguration of unit cells endows the micromachined reconfigurable metamaterials with unique merits such as electromagnetic response under normal incidence and wide tuning of resonant frequency (measured as 31% and 22% for transverse electric polarization and transverse magnetic polarization, respectively). The reconfiguration could also allow switching between the polarization-dependent and polarization-independent states. With these features, the micromachined reconfigurable metamaterials may find potential applications in transformation optics devices, sensors, intelligent detectors, tunable frequency-selective surfaces, and spectral filters.
1616-301X
3589-3594
Fu, Yuan Hsing
0fb31170-4aa7-46f8-bacb-05e3fa699cf2
Liu, Ai Qun
408a2bbb-a924-41b9-ae75-54997e861c1e
Zhu, Wei Ming
686e1e16-d394-41dd-8d44-7cc8e7154a51
Zhang, Xu Ming
89e8f280-33ec-48ed-a353-197f6609dd10
Tsai, Din Ping
29dbf01e-c22a-45a5-95b3-839a185d1779
Zhang, Jing Bo
79ab2322-f66b-4d30-83be-b828c7cb67ff
Mei, Ting
98248fef-46b9-448d-a9df-f2fd63fe5bb4
Tao, Ji Fang
88bc617e-94af-4e2d-bbb1-651ef63d4f0d
Guo, Hong Chen
abb2386c-ca45-4067-8b52-0f4c4f97b678
Zhang, Xin Hai
2ede237f-5716-4ad8-843f-7101ffa27d4f
Teng, Jing Hua
da38b908-e571-4dd4-a8ca-1d13727be1c4
Zheludev, Nikolay I.
32fb6af7-97e4-4d11-bca6-805745e40cc6
Lo, Guo Qiang
fd50b1b7-53d7-4bce-b4f5-f041286a43c8
Kwong, Dim Lee
30e39929-fd26-493c-af85-c12bd61deeec
Fu, Yuan Hsing
0fb31170-4aa7-46f8-bacb-05e3fa699cf2
Liu, Ai Qun
408a2bbb-a924-41b9-ae75-54997e861c1e
Zhu, Wei Ming
686e1e16-d394-41dd-8d44-7cc8e7154a51
Zhang, Xu Ming
89e8f280-33ec-48ed-a353-197f6609dd10
Tsai, Din Ping
29dbf01e-c22a-45a5-95b3-839a185d1779
Zhang, Jing Bo
79ab2322-f66b-4d30-83be-b828c7cb67ff
Mei, Ting
98248fef-46b9-448d-a9df-f2fd63fe5bb4
Tao, Ji Fang
88bc617e-94af-4e2d-bbb1-651ef63d4f0d
Guo, Hong Chen
abb2386c-ca45-4067-8b52-0f4c4f97b678
Zhang, Xin Hai
2ede237f-5716-4ad8-843f-7101ffa27d4f
Teng, Jing Hua
da38b908-e571-4dd4-a8ca-1d13727be1c4
Zheludev, Nikolay I.
32fb6af7-97e4-4d11-bca6-805745e40cc6
Lo, Guo Qiang
fd50b1b7-53d7-4bce-b4f5-f041286a43c8
Kwong, Dim Lee
30e39929-fd26-493c-af85-c12bd61deeec

Fu, Yuan Hsing, Liu, Ai Qun, Zhu, Wei Ming, Zhang, Xu Ming, Tsai, Din Ping, Zhang, Jing Bo, Mei, Ting, Tao, Ji Fang, Guo, Hong Chen, Zhang, Xin Hai, Teng, Jing Hua, Zheludev, Nikolay I., Lo, Guo Qiang and Kwong, Dim Lee (2011) A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators. Advanced Functional Materials, 21 (18), 3589-3594. (doi:10.1002/adfm.201101087).

Record type: Article

Abstract

A micromachined reconfigurable metamaterial is presented, whose unit cell consists of a pair of asymmetric split-ring resonators (ASRRs); one is fixed to the substrate while the other is patterned on a movable frame. The reconfigurable metamaterial and the supporting structures (e.g., microactuators, anchors, supporting frames, etc.) are fabricated on a silicon-on-insulator wafer using deep reactive-ion etching (DRIE). By adjusting the distance between the two ASRRs, the strength of dipole–dipole coupling can be tuned continuously using the micromachined actuators and this enables tailoring of the electromagnetic response. The reconfiguration of unit cells endows the micromachined reconfigurable metamaterials with unique merits such as electromagnetic response under normal incidence and wide tuning of resonant frequency (measured as 31% and 22% for transverse electric polarization and transverse magnetic polarization, respectively). The reconfiguration could also allow switching between the polarization-dependent and polarization-independent states. With these features, the micromachined reconfigurable metamaterials may find potential applications in transformation optics devices, sensors, intelligent detectors, tunable frequency-selective surfaces, and spectral filters.

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More information

Published date: 23 September 2011
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 356357
URI: https://eprints.soton.ac.uk/id/eprint/356357
ISSN: 1616-301X
PURE UUID: 030007dd-f00c-4eed-996c-6b2f82f7992f
ORCID for Nikolay I. Zheludev: ORCID iD orcid.org/0000-0002-1013-6636

Catalogue record

Date deposited: 16 Sep 2013 11:16
Last modified: 26 Nov 2019 02:03

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Contributors

Author: Yuan Hsing Fu
Author: Ai Qun Liu
Author: Wei Ming Zhu
Author: Xu Ming Zhang
Author: Din Ping Tsai
Author: Jing Bo Zhang
Author: Ting Mei
Author: Ji Fang Tao
Author: Hong Chen Guo
Author: Xin Hai Zhang
Author: Jing Hua Teng
Author: Guo Qiang Lo
Author: Dim Lee Kwong

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