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Rib waveguides for mid-infrared silicon photonics

Rib waveguides for mid-infrared silicon photonics
Rib waveguides for mid-infrared silicon photonics
Design rules for both single-mode and polarization-independent strained silicon-on-insulator rib waveguides at the wavelength of 3.39 µm are presented for the first time to our knowledge. Waveguide geometries with different parameters, such as waveguide height, rib width, etch depth, top oxide cover thickness and sidewall angle, have been studied in order to investigate and define design rules that will make devices suitable for mid-IR applications. Chebyshev bivariate interpolation with a standard deviation of less than 1% has been used to represent the zero-birefringence surface. Experimental results for the upper cladding stress level have been used to determine the influence of top oxide cover thickness and different levels of upper cladding stress on waveguide characteristics. Finally, the polarization-insensitive and single-mode locus is presented for different waveguide heights.
0740-3224
1760-1766
Milošević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Matavulj, Petar S.
3dd01d0f-a391-41e6-83c1-e97de8955f13
Yang, Pengyuan
aab36b0c-8636-4d8c-b306-c9aae2e034ef
Bagolini, Alvise
f8a11377-6c0f-4985-904d-acd32a0f572c
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051
Milošević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Matavulj, Petar S.
3dd01d0f-a391-41e6-83c1-e97de8955f13
Yang, Pengyuan
aab36b0c-8636-4d8c-b306-c9aae2e034ef
Bagolini, Alvise
f8a11377-6c0f-4985-904d-acd32a0f572c
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051

Milošević, Milan M., Matavulj, Petar S., Yang, Pengyuan, Bagolini, Alvise and Mashanovich, Goran Z. (2009) Rib waveguides for mid-infrared silicon photonics. Journal of the Optical Society of America B, 26 (9), 1760-1766. (doi:10.1364/JOSAB.26.001760).

Record type: Article

Abstract

Design rules for both single-mode and polarization-independent strained silicon-on-insulator rib waveguides at the wavelength of 3.39 µm are presented for the first time to our knowledge. Waveguide geometries with different parameters, such as waveguide height, rib width, etch depth, top oxide cover thickness and sidewall angle, have been studied in order to investigate and define design rules that will make devices suitable for mid-IR applications. Chebyshev bivariate interpolation with a standard deviation of less than 1% has been used to represent the zero-birefringence surface. Experimental results for the upper cladding stress level have been used to determine the influence of top oxide cover thickness and different levels of upper cladding stress on waveguide characteristics. Finally, the polarization-insensitive and single-mode locus is presented for different waveguide heights.

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More information

Published date: 2009
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 356474
URI: https://eprints.soton.ac.uk/id/eprint/356474
ISSN: 0740-3224
PURE UUID: 4cf6edcd-d87b-49ca-87c8-2082672b5e4c

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Date deposited: 16 Sep 2013 11:32
Last modified: 16 Jul 2019 21:23

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