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Design rules for single-mode and polarization-independent silicon-on-insulator rib waveguides using stress engineering

Design rules for single-mode and polarization-independent silicon-on-insulator rib waveguides using stress engineering
Design rules for single-mode and polarization-independent silicon-on-insulator rib waveguides using stress engineering
There is a trend towards miniaturization of silicon photonic circuits due to superior performance and small cost. Design rules that must be imposed on the geometry of optical waveguides to make them behave as polarization-independent and singlemode devices are well known for waveguides with relatively large cross sections and for some small cross-sectional rib waveguides with vertical sidewalls and an air top cladding. The influence of the top oxide cover on waveguide birefringence was analyzed recently, but only for relatively large cross-sectional waveguides. This paper reports simulations for both single-mode and polarization-independent behavior for small cross-sectional waveguides with variable rib width, etch depth, top oxide cover thickness, and sidewall angle. The results show that the stress-induced effects must be taken into account to satisfy both requirements. Design rules to maintain birefringence-free operation and to satisfy single-mode behavior for small rib silicon-on-insulator (SOI) waveguides are presented.
0733-8724
1840-1846
Milošević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Matavulj, Petar S.
3dd01d0f-a391-41e6-83c1-e97de8955f13
Timotijevic, Branislav D.
8491f588-e63e-42f6-8e3e-1552fb6b7f9b
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051
Milošević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Matavulj, Petar S.
3dd01d0f-a391-41e6-83c1-e97de8955f13
Timotijevic, Branislav D.
8491f588-e63e-42f6-8e3e-1552fb6b7f9b
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051

Milošević, Milan M., Matavulj, Petar S., Timotijevic, Branislav D., Reed, Graham T. and Mashanovich, Goran Z. (2008) Design rules for single-mode and polarization-independent silicon-on-insulator rib waveguides using stress engineering. IEEE Journal of Lightwave Technology, 26 (13), 1840-1846. (doi:10.1109/JLT.2008.922193).

Record type: Article

Abstract

There is a trend towards miniaturization of silicon photonic circuits due to superior performance and small cost. Design rules that must be imposed on the geometry of optical waveguides to make them behave as polarization-independent and singlemode devices are well known for waveguides with relatively large cross sections and for some small cross-sectional rib waveguides with vertical sidewalls and an air top cladding. The influence of the top oxide cover on waveguide birefringence was analyzed recently, but only for relatively large cross-sectional waveguides. This paper reports simulations for both single-mode and polarization-independent behavior for small cross-sectional waveguides with variable rib width, etch depth, top oxide cover thickness, and sidewall angle. The results show that the stress-induced effects must be taken into account to satisfy both requirements. Design rules to maintain birefringence-free operation and to satisfy single-mode behavior for small rib silicon-on-insulator (SOI) waveguides are presented.

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More information

Published date: 29 August 2008
Organisations: Optoelectronics Research Centre, Nanoelectronics and Nanotechnology, Photonic Systems Circuits & Sensors

Identifiers

Local EPrints ID: 356482
URI: https://eprints.soton.ac.uk/id/eprint/356482
ISSN: 0733-8724
PURE UUID: eda3b68a-071b-435d-81b1-cb68a8d45700

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Date deposited: 16 Sep 2013 14:08
Last modified: 16 Jul 2019 21:23

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Contributors

Author: Petar S. Matavulj
Author: Branislav D. Timotijevic
Author: Graham T. Reed

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