The University of Southampton
University of Southampton Institutional Repository

Three-dimensional control of optical waveguide fabrication in silicon

Three-dimensional control of optical waveguide fabrication in silicon
Three-dimensional control of optical waveguide fabrication in silicon
In this paper, we report a direct-write technique for three dimensional control of waveguide fabrication in silicon. Here, a focused beam of 250 keV protons is used to selectively slow down the rate of porous silicon formation during subsequent anodization, producing a silicon core surrounded by porous silicon cladding. The etch rate is found to depend on the irradiated dose, increasing the size of the core from 2.5 µm to 3.5 µm in width, and from 1.5 µm to 2.6 µm in height by increasing the dose by an order of magnitude. This ability to accurately control the waveguide profile with the ion dose at high spatial resolution provides a means of producing three-dimensional silicon waveguide tapers. Propagation losses of 6.7 dB/cm for TE and 6.8 dB/cm for TM polarization were measured in linear waveguides at the wavelength of 1550 nm.
1094-4087
573-578
Teo, Ee J.
28e9c459-5f68-48a1-92ed-f4c525407291
Bettiol, Andrew A.
ebeefad1-b7f1-4f93-ba09-e9b1a52536fb
Breese, Mark B.
7addc94f-0424-43c4-be99-317ff887a83c
Yang, Pengyuan
aab36b0c-8636-4d8c-b306-c9aae2e034ef
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051
Headley, William R.
233d5522-ec8e-48ce-b6d2-8565d2c9e304
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Blackwood, Daniel J.
3a890de4-2756-4582-886c-dd036e948ef7
Teo, Ee J.
28e9c459-5f68-48a1-92ed-f4c525407291
Bettiol, Andrew A.
ebeefad1-b7f1-4f93-ba09-e9b1a52536fb
Breese, Mark B.
7addc94f-0424-43c4-be99-317ff887a83c
Yang, Pengyuan
aab36b0c-8636-4d8c-b306-c9aae2e034ef
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051
Headley, William R.
233d5522-ec8e-48ce-b6d2-8565d2c9e304
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Blackwood, Daniel J.
3a890de4-2756-4582-886c-dd036e948ef7

Teo, Ee J., Bettiol, Andrew A., Breese, Mark B., Yang, Pengyuan, Mashanovich, Goran Z., Headley, William R., Reed, Graham T. and Blackwood, Daniel J. (2008) Three-dimensional control of optical waveguide fabrication in silicon. Optics Express, 16 (2), 573-578. (doi:10.1364/OE.16.000573).

Record type: Article

Abstract

In this paper, we report a direct-write technique for three dimensional control of waveguide fabrication in silicon. Here, a focused beam of 250 keV protons is used to selectively slow down the rate of porous silicon formation during subsequent anodization, producing a silicon core surrounded by porous silicon cladding. The etch rate is found to depend on the irradiated dose, increasing the size of the core from 2.5 µm to 3.5 µm in width, and from 1.5 µm to 2.6 µm in height by increasing the dose by an order of magnitude. This ability to accurately control the waveguide profile with the ion dose at high spatial resolution provides a means of producing three-dimensional silicon waveguide tapers. Propagation losses of 6.7 dB/cm for TE and 6.8 dB/cm for TM polarization were measured in linear waveguides at the wavelength of 1550 nm.

Text
oe-16-2-573 - Version of Record
Available under License Creative Commons Attribution.
Download (2MB)

More information

Published date: 21 January 2008
Organisations: Optoelectronics Research Centre, Photonic Systems Circuits & Sensors

Identifiers

Local EPrints ID: 356484
URI: https://eprints.soton.ac.uk/id/eprint/356484
ISSN: 1094-4087
PURE UUID: e9b213c8-cdcb-45cb-af65-4f0984615371

Catalogue record

Date deposited: 16 Sep 2013 13:56
Last modified: 28 Oct 2019 21:04

Export record

Altmetrics

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×