Ben Masaud, Taha, Tarazona, Antulio, Jaberansary, Ehsan, Chen, Xia, Reed, Graham T., Mashanovich, Goran Z. and Chong, Harold M.H. (2013) Hot-wire polysilicon waveguides with low deposition temperature. Optics Letters, 38 (20), 4030-4032. (doi:10.1364/OL.38.004030).
Abstract
We fabricated and measured the optical loss of polysilicon waveguides deposited using Hot-Wire Chemical Vapour Deposition (HWCVD) at a temperature of 240°C. A polysilicon film 220 nm thick was deposited on top of a 2000 nm thick PECVD silicon dioxide. The crystalline volume fraction of the polysilicon film was measured by Raman spectroscopy to be 91%. The optical propagation losses of 400, 500, and 600 nm waveguides were measured to be 16.9, 15.9, and 13.5 dB/cm, respectively, for transverse electric (TE) mode at the wavelength of 1550 nm. Scattering loss is expected to be the major contributor to the propagation loss.
More information
Identifiers
Catalogue record
Export record
Altmetrics
Contributors
University divisions
- Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Electronics & Computer Science (pre 2018 reorg) > Nanoelectronics and Nanotechnology (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) > Nanoelectronics and Nanotechnology (pre 2018 reorg)
School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) > Nanoelectronics and Nanotechnology (pre 2018 reorg) - Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Electronics & Computer Science (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg)
School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) - Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Electronics & Computer Science (pre 2018 reorg) > Photonic Systems Circuits & Sensors (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) > Photonic Systems Circuits & Sensors (pre 2018 reorg)
School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) > Photonic Systems Circuits & Sensors (pre 2018 reorg) - Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Optoelectronics Research Centre (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics > Optoelectronics Research Centre (pre 2018 reorg)
Zepler Institute for Photonics and Nanoelectronics > Optoelectronics Research Centre (pre 2018 reorg)
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.