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Low optical-loss facet preparation for silica-on-silicon photonics using the ductile dicing regime

Low optical-loss facet preparation for silica-on-silicon photonics using the ductile dicing regime
Low optical-loss facet preparation for silica-on-silicon photonics using the ductile dicing regime
The efficient production of high-quality facets for low-loss coupling is a significant production issue in integrated optics, usually requiring time consuming and manually intensive lapping and polishing steps, which add considerably to device fabrication costs. The development of precision dicing saws with diamond impregnated blades has allowed optical grade surfaces to be machined in crystalline materials such as lithium niobate and garnets. In this report we investigate the optimization of dicing machine parameters to obtain optical quality surfaces in a silica-on-silicon planar device demonstrating high optical quality in a commercially important glassy material. We achieve a surface roughness of 4.9 nm (Sa) using the optimized dicing conditions. By machining a groove across a waveguide, using the optimized dicing parameters, a grating based loss measurement technique is used to measure precisely the average free space interface loss per facet caused by scattering as a consequence of surface roughness. The average interface loss per facet was calculated to be: -0.63 dB and -0.76 dB for the TE and TM polarizations, respectively.
0022-3727
475103-[9pp]
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Cooper, Peter A.
29354b98-c117-4ace-9ca4-1d3ad531485f
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Cooper, Peter A.
29354b98-c117-4ace-9ca4-1d3ad531485f
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6

Carpenter, Lewis, Rogers, Helen, Cooper, Peter A., Holmes, Christopher, Gates, James C. and Smith, Peter G.R. (2013) Low optical-loss facet preparation for silica-on-silicon photonics using the ductile dicing regime. Journal of Physics D: Applied Physics, 46 (47), 475103-[9pp]. (doi:10.1088/0022-3727/46/47/475103).

Record type: Article

Abstract

The efficient production of high-quality facets for low-loss coupling is a significant production issue in integrated optics, usually requiring time consuming and manually intensive lapping and polishing steps, which add considerably to device fabrication costs. The development of precision dicing saws with diamond impregnated blades has allowed optical grade surfaces to be machined in crystalline materials such as lithium niobate and garnets. In this report we investigate the optimization of dicing machine parameters to obtain optical quality surfaces in a silica-on-silicon planar device demonstrating high optical quality in a commercially important glassy material. We achieve a surface roughness of 4.9 nm (Sa) using the optimized dicing conditions. By machining a groove across a waveguide, using the optimized dicing parameters, a grating based loss measurement technique is used to measure precisely the average free space interface loss per facet caused by scattering as a consequence of surface roughness. The average interface loss per facet was calculated to be: -0.63 dB and -0.76 dB for the TE and TM polarizations, respectively.

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More information

Published date: 2013
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 360054
URI: https://eprints.soton.ac.uk/id/eprint/360054
ISSN: 0022-3727
PURE UUID: 702a7875-9835-46f9-8dec-eac6afed06e8
ORCID for James C. Gates: ORCID iD orcid.org/0000-0001-8671-5987

Catalogue record

Date deposited: 25 Nov 2013 11:23
Last modified: 07 Aug 2019 00:46

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