Polish-like facet preparation via dicing for silica integrated optics
Polish-like facet preparation via dicing for silica integrated optics
Preparation of high quality facets for low-loss coupling is a significant production issue for integrated photonics, usually requiring time consuming lapping and polishing. Recently, the development of precision dicing saws with diamond impregnated blades has allowed the achievement of optical grade surfaces in optical materials based on dicing alone. In this report we investigate the optimization dicing conditions to achieve optical quality surfaces in a silica-on-silicon planar substrate and show what can be achieved by correct selection of machining parameters.
Carpenter, Lewis
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Rogers, Helen
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Holmes, C.
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Gates, J.C.
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Smith, P.G.R.
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February 2013
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Rogers, Helen
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Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Carpenter, Lewis, Rogers, Helen, Holmes, C., Gates, J.C. and Smith, P.G.R.
(2013)
Polish-like facet preparation via dicing for silica integrated optics.
SPIE Photonics West: Optical Components and Materials X, San Francisco, United States.
05 - 06 Feb 2013.
(doi:10.1117/12.2004342).
Record type:
Conference or Workshop Item
(Paper)
Abstract
Preparation of high quality facets for low-loss coupling is a significant production issue for integrated photonics, usually requiring time consuming lapping and polishing. Recently, the development of precision dicing saws with diamond impregnated blades has allowed the achievement of optical grade surfaces in optical materials based on dicing alone. In this report we investigate the optimization dicing conditions to achieve optical quality surfaces in a silica-on-silicon planar substrate and show what can be achieved by correct selection of machining parameters.
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Published date: February 2013
Venue - Dates:
SPIE Photonics West: Optical Components and Materials X, San Francisco, United States, 2013-02-05 - 2013-02-06
Organisations:
Optoelectronics Research Centre
Identifiers
Local EPrints ID: 360178
URI: http://eprints.soton.ac.uk/id/eprint/360178
PURE UUID: 5f1fe910-29a2-4b48-b5e8-97ea8f827095
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Date deposited: 28 Nov 2013 14:03
Last modified: 15 Mar 2024 03:27
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Contributors
Author:
Lewis Carpenter
Author:
Helen Rogers
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